基于光丝效应的飞秒激光单次高质量直接切割薄石英玻璃工艺研究(特邀)

A one-step direct cutting method of 200 μm quartz glass using high-repetition frequency femtosecond laser combined with scanning galvanometer based on filament effect was proposed. Through the optimization of the processing process parameters, the fast and high-quality cutting of thin quartz glass is realized. The processing speed can be achieved 10 mm/s, the edge chipping is less 7.5 μm, and the roughness of the cross section is achieved 1 μm. The method realizes the simultaneous improvement of thin glass cutting efficiency and quality, and has a good application prospect in the field of laser processing.