不同桥形微结构换能元的仿真设计与实验研究

Microstructure energy conversion components are the key components of micro-electro-mechanical-system (MEMS) initiating explosive device, its bridge area microstructure design has a significant effect on the output performance and energy utilization rate of MEMS initiating explosive device. To perfect the design theory of microstructure energy conversion components of MEMS initiating explosive device, 8 kinds of microstructure energy conversion components with different bridge shapes were designed and fabricated. The bridge-shaped structure optimization and microstructure effect of microstructure energy conversion components were studied by means of simulation research and infrared test. Two kinds of energy conversion components with V-50 and L-1 optimization bridge-shaped structure were obtained, and the influence law of different bridge-shaped structure on the output performance of energy conversion components was revealed, in which, the average ignition voltage of V-50 bridge-shaped microstructure energy conversion components reaches 100 μF/3.5 V, and the energy utilization rate is 46.6%.