X-ray diffraction and scanning electron microscopy observation of lead zirconate titanate thick film formed by gas deposition method

A lead zirconate titanate (Pb(Zr, Ti)O₃, PZT) thick film was produced using the Jet Molding System which was developed from a gas deposition method. Some of the characteristics of the deposited lead zirconate titanate were determined by X-ray diffraction, scanning electron microscopy and atomic force microscopy. The dielectric constant was determined to be 760 after 500°C and 10 min of heat treatment for nonpolarized sample. Through scanning electron microscope observation, some properties of the deposition of ultrafine particles of PZT were determined. A joining of the deposited particles could be observed, which means a kind of sintering was caused by the deposition process. Crystal structure analysis was carried out using X-ray diffraction for structural comparison before and after deposition. The perovskite structure of PZT was proved to be retained during the deposition process.