Web based coupled energy domains simulation platform of MEMS: A bond graph approach

A Bond-Graph-Based methodology for the system level modeling and simulation of MEMS in coupled-energy domains is presented. To allow the coupled simulation of complex and heterogeneous micro electromechanical systems, a web based simulation platform - xj_Bond was developed to support the tasks. To support MEMS Top-Down design flow and system level rapid modeling, a micro electromechanical components template library including beams, joints, plates masses, electrostatic gaps and etc, was also designed and implemented in this platform on the basis of bond graph multiport field and junction structures. Using a piezoelectric Micro-Hydraulic Transducer (MHT) as an example, the corresponding modeling and simulation process is demonstrated in terms of using this platform.