Uniformity of ZnS bulk materials prepared by chemical vapor deposition

Yong Han; Xiulin Zheng; Zhengtang Liu

Uniformity of ZnS bulk materials prepared by chemical vapor deposition

Yong Han
, Xiulin Zheng
, Zhengtang Liu

Northwestern Polytechnical University Xian

Research output: Contribution to journal › Article › peer-review

Abstract

The ZnS bulk materials have been prepared by the chemical vapor deposition from H₂S and Zn. The effect of deposition temperature, pressure and flow volume of H₂S, Zn vapor and Ar on the thickness uniformity of ZnS was studied, and the ways of improving the thickness uniformity of ZnS and avoiding the nodular growth of ZnS on deposition surface were put forward.

Original language	English
Pages (from-to)	25-27
Number of pages	3
Journal	Cailiao Gongcheng/Journal of Materials Engineering
Issue number	12
State	Published - Dec 1996
Externally published	Yes

Cite this

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title = "Uniformity of ZnS bulk materials prepared by chemical vapor deposition",

abstract = "The ZnS bulk materials have been prepared by the chemical vapor deposition from H2S and Zn. The effect of deposition temperature, pressure and flow volume of H2S, Zn vapor and Ar on the thickness uniformity of ZnS was studied, and the ways of improving the thickness uniformity of ZnS and avoiding the nodular growth of ZnS on deposition surface were put forward.",

author = "Yong Han and Xiulin Zheng and Zhengtang Liu",

year = "1996",

month = dec,

language = "英语",

pages = "25--27",

journal = "Cailiao Gongcheng/Journal of Materials Engineering",

issn = "1001-4381",

publisher = "Science Press ",

number = "12",

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T1 - Uniformity of ZnS bulk materials prepared by chemical vapor deposition

AU - Han, Yong

AU - Zheng, Xiulin

AU - Liu, Zhengtang

PY - 1996/12

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N2 - The ZnS bulk materials have been prepared by the chemical vapor deposition from H2S and Zn. The effect of deposition temperature, pressure and flow volume of H2S, Zn vapor and Ar on the thickness uniformity of ZnS was studied, and the ways of improving the thickness uniformity of ZnS and avoiding the nodular growth of ZnS on deposition surface were put forward.

AB - The ZnS bulk materials have been prepared by the chemical vapor deposition from H2S and Zn. The effect of deposition temperature, pressure and flow volume of H2S, Zn vapor and Ar on the thickness uniformity of ZnS was studied, and the ways of improving the thickness uniformity of ZnS and avoiding the nodular growth of ZnS on deposition surface were put forward.

UR - https://www.scopus.com/pages/publications/0030365994

M3 - 文章

AN - SCOPUS:0030365994

SN - 1001-4381

SP - 25

EP - 27

JO - Cailiao Gongcheng/Journal of Materials Engineering

JF - Cailiao Gongcheng/Journal of Materials Engineering

IS - 12

ER -

Uniformity of ZnS bulk materials prepared by chemical vapor deposition

Abstract

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