@inproceedings{e7b15ad6afd346249caaf27011efa280,
title = "Ultra high performance gas sensor based on IC compatible fusion of micromachined hotplatform and nanostructured porous film",
abstract = "Ultra-high performances of low power, high sensitivity, and fast response was achieved in a novel micro/nano gas sensor that fused a microhotplatform (MHP) and a monolayer of ordered porous SnO2 nanofilm. Based on the MHP with a platinum microheater and interdigital electrode (IDE), a highly ordered SnO2 porous film was in-situ synthesized using a polystyrene sphere monolayer colloidal crystal template. Test results indicated that the sensor was sensitive to 100 ppb ethanol with a sensitivity of 1.6 (R air/Rgas), a power consumption of 25 mW and a response time less than 2 s. The detection limit of the sensor was calculated as 9 ppb.",
keywords = "SnO, micro/nano gas sensor, microhotplatform, ordered porous nanofilm",
author = "Lei Xu and Zhengfei Dai and Tie Li and Guotao Duan and Weiping Cai and Yuelin Wang",
year = "2013",
doi = "10.1109/Transducers.2013.6627205",
language = "英语",
isbn = "9781467359818",
series = "2013 Transducers and Eurosensors XXVII: The 17th International Conference on Solid-State Sensors, Actuators and Microsystems, TRANSDUCERS and EUROSENSORS 2013",
pages = "2063--2066",
booktitle = "2013 Transducers and Eurosensors XXVII",
note = "2013 17th International Conference on Solid-State Sensors, Actuators and Microsystems, TRANSDUCERS and EUROSENSORS 2013 ; Conference date: 16-06-2013 Through 20-06-2013",
}