TY - JOUR
T1 - Tribological behaviors of oxygen-doped carbon coatings deposited by ion-irradiation-assisted growth
AU - Guo, Meiling
AU - Yang, Lei
AU - Yang, Zhenchao
AU - Zhang, Dongya
AU - Wang, Quandai
AU - Li, Pengyang
AU - Zhao, Pengkang
AU - Yang, Mingshun
AU - Li, Yan
N1 - Publisher Copyright:
© 2021 Elsevier B.V.
PY - 2021/11/15
Y1 - 2021/11/15
N2 - Oxygen-doped carbon coatings were deposited by ion-irradiation-assisted growth using an electron cyclotron resonance plasma processing system, and the effects of the O2 content on the coating's structure and tribological behavior were studied. During the coating deposition, O+, O2+, and Ar+ ions in the oxygen plasma were attracted to irradiate the growing coating surface, realizing oxygen plasma during-etching. X-ray photoelectron spectroscopy characterization showed that the O2 addition incorporated some oxygen atoms into the carbon coating, and the sp3/sp2 ratio of the entire coating increased. Such structural changes made the carbon coating present higher nanoscratch resistance and longer wear life that increased from 990 cycles to more than 5000 cycles. Finally, the reason why the oxygen doping can induce the sp3/sp2 ratio to increase was suggested to be ion-irradiation-induced chemical recombination energy release, which could only occur when the O2 introduction reduced the atom displacement threshold energy.
AB - Oxygen-doped carbon coatings were deposited by ion-irradiation-assisted growth using an electron cyclotron resonance plasma processing system, and the effects of the O2 content on the coating's structure and tribological behavior were studied. During the coating deposition, O+, O2+, and Ar+ ions in the oxygen plasma were attracted to irradiate the growing coating surface, realizing oxygen plasma during-etching. X-ray photoelectron spectroscopy characterization showed that the O2 addition incorporated some oxygen atoms into the carbon coating, and the sp3/sp2 ratio of the entire coating increased. Such structural changes made the carbon coating present higher nanoscratch resistance and longer wear life that increased from 990 cycles to more than 5000 cycles. Finally, the reason why the oxygen doping can induce the sp3/sp2 ratio to increase was suggested to be ion-irradiation-induced chemical recombination energy release, which could only occur when the O2 introduction reduced the atom displacement threshold energy.
KW - Chemical recombination energy release
KW - Ion-irradiation-assisted deposition
KW - Oxygen plasma etching
KW - Oxygen-doped carbon coating
KW - Tribological behavior
UR - https://www.scopus.com/pages/publications/85114823424
U2 - 10.1016/j.surfcoat.2021.127689
DO - 10.1016/j.surfcoat.2021.127689
M3 - 文章
AN - SCOPUS:85114823424
SN - 0257-8972
VL - 425
JO - Surface and Coatings Technology
JF - Surface and Coatings Technology
M1 - 127689
ER -