@inproceedings{bd93d3ea14194dd09005ea350d172a1c,
title = "Transfer technology of ferroelectric films onto the polymer substrate for the application of high density capacitor",
abstract = "High dielectric capacitors , that has around 1000 in dielectric constant, can be successfully formed by nanotransfer on non-heat-resisting substrates. PZT film could be released from the Si substrate and bonded onto the polymer one. The releasing characteristics have the relationships with the thickness of Pt layer. The formed PZT has perovskite structure and clear columnar texture.",
keywords = "Capacitor, Ferroelectrics, PZT, Transfer method",
author = "Masaaki Ichiki and Ryutaro Maeda and Tadatomo Suga",
year = "2009",
doi = "10.4028/www.scientific.net/AMR.74.311",
language = "英语",
isbn = "0878493212",
series = "Advanced Materials Research",
pages = "311--314",
booktitle = "NEMS/MEMS Technology and Devices - Selected, peer reviewed papers from the International Conference on Materials for Advanced Technologies 2009, ICMAT 2009",
note = "International Conference on Materials for Advanced Technologies, ICMAT 2009 ; Conference date: 28-06-2009 Through 03-07-2009",
}