Tip scanning dynamic SFM using piezoelectric cantilever for full wafer inspection

J. Chu; R. Maeda; T. Itoh; T. Suga

doi:10.1109/IMNC.1999.797528

Tip scanning dynamic SFM using piezoelectric cantilever for full wafer inspection

J. Chu
, R. Maeda
, T. Itoh
, T. Suga

Research output: Chapter in Book/Report/Conference proceeding › Conference contribution › peer-review

Abstract

The dynamic scanning force microscope (DSFM) has proven itself as a versatile instrument for science and technology. It has made possible the measurement of surface structures with sizes ranging from a single atom to several micrometers. But practically, the samples to be inspected are often too big to fit the SFM sample stage of traditional SFM systems. In this report, we propose a new structure of DSFM compatible with full wafer inspection.

Original language	English
Title of host publication	1999 International Microprocesses and Nanotechnology Conference
Publisher	Institute of Electrical and Electronics Engineers Inc.
Pages	164-165
Number of pages	2
ISBN (Electronic)	4930813972, 9784930813978
DOIs	https://doi.org/10.1109/IMNC.1999.797528
State	Published - 1999
Externally published	Yes
Event	1999 International Microprocesses and Nanotechnology Conference - Yokohama, Japan Duration: 6 Jul 1999 → 8 Jul 1999

Publication series

Name	1999 International Microprocesses and Nanotechnology Conference

Conference

Conference	1999 International Microprocesses and Nanotechnology Conference
Country/Territory	Japan
City	Yokohama
Period	6/07/99 → 8/07/99

Access to Document

10.1109/IMNC.1999.797528

Cite this

Chu, J., Maeda, R., Itoh, T., & Suga, T. (1999). Tip scanning dynamic SFM using piezoelectric cantilever for full wafer inspection. In 1999 International Microprocesses and Nanotechnology Conference (pp. 164-165). Article 797528 (1999 International Microprocesses and Nanotechnology Conference). Institute of Electrical and Electronics Engineers Inc.. https://doi.org/10.1109/IMNC.1999.797528

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title = "Tip scanning dynamic SFM using piezoelectric cantilever for full wafer inspection",

abstract = "The dynamic scanning force microscope (DSFM) has proven itself as a versatile instrument for science and technology. It has made possible the measurement of surface structures with sizes ranging from a single atom to several micrometers. But practically, the samples to be inspected are often too big to fit the SFM sample stage of traditional SFM systems. In this report, we propose a new structure of DSFM compatible with full wafer inspection.",

author = "J. Chu and R. Maeda and T. Itoh and T. Suga",

note = "Publisher Copyright: {\textcopyright} 1999 Japan Soc. Of Applied Physics.; 1999 International Microprocesses and Nanotechnology Conference ; Conference date: 06-07-1999 Through 08-07-1999",

year = "1999",

doi = "10.1109/IMNC.1999.797528",

language = "英语",

series = "1999 International Microprocesses and Nanotechnology Conference",

publisher = "Institute of Electrical and Electronics Engineers Inc.",

pages = "164--165",

booktitle = "1999 International Microprocesses and Nanotechnology Conference",

}

Chu, J, Maeda, R, Itoh, T & Suga, T 1999, Tip scanning dynamic SFM using piezoelectric cantilever for full wafer inspection. in 1999 International Microprocesses and Nanotechnology Conference., 797528, 1999 International Microprocesses and Nanotechnology Conference, Institute of Electrical and Electronics Engineers Inc., pp. 164-165, 1999 International Microprocesses and Nanotechnology Conference, Yokohama, Japan, 6/07/99. https://doi.org/10.1109/IMNC.1999.797528

Tip scanning dynamic SFM using piezoelectric cantilever for full wafer inspection. / Chu, J.; Maeda, R.; Itoh, T. et al.
1999 International Microprocesses and Nanotechnology Conference. Institute of Electrical and Electronics Engineers Inc., 1999. p. 164-165 797528 (1999 International Microprocesses and Nanotechnology Conference).

Research output: Chapter in Book/Report/Conference proceeding › Conference contribution › peer-review

TY - GEN

T1 - Tip scanning dynamic SFM using piezoelectric cantilever for full wafer inspection

AU - Chu, J.

AU - Maeda, R.

AU - Itoh, T.

AU - Suga, T.

PY - 1999

Y1 - 1999

N2 - The dynamic scanning force microscope (DSFM) has proven itself as a versatile instrument for science and technology. It has made possible the measurement of surface structures with sizes ranging from a single atom to several micrometers. But practically, the samples to be inspected are often too big to fit the SFM sample stage of traditional SFM systems. In this report, we propose a new structure of DSFM compatible with full wafer inspection.

AB - The dynamic scanning force microscope (DSFM) has proven itself as a versatile instrument for science and technology. It has made possible the measurement of surface structures with sizes ranging from a single atom to several micrometers. But practically, the samples to be inspected are often too big to fit the SFM sample stage of traditional SFM systems. In this report, we propose a new structure of DSFM compatible with full wafer inspection.

UR - https://www.scopus.com/pages/publications/85043776660

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DO - 10.1109/IMNC.1999.797528

M3 - 会议稿件

AN - SCOPUS:85043776660

T3 - 1999 International Microprocesses and Nanotechnology Conference

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BT - 1999 International Microprocesses and Nanotechnology Conference

PB - Institute of Electrical and Electronics Engineers Inc.

T2 - 1999 International Microprocesses and Nanotechnology Conference

Y2 - 6 July 1999 through 8 July 1999

ER -

Tip scanning dynamic SFM using piezoelectric cantilever for full wafer inspection

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