Abstract
In this study we demonstrate the structure of a new dynamic force microscope (DFM) compatible with full wafer inspection. It is a tip-scanning-type DFM based on a piezoelectric micro-cantilever integrated with a conical tip as a force sensor. The piezoelectric micro-force sensor is mounted on top of a tube scanner. The sample is put on the sample stage facing the tip. The novel DFM has proven to be stable for probing the surface of full wafers with a vertical resolution of about 0.12 nm. The design and performance of the novel tip scanning DFM is explained in detail in this report.
| Original language | English |
|---|---|
| Pages (from-to) | 7155-7158 |
| Number of pages | 4 |
| Journal | Japanese Journal of Applied Physics |
| Volume | 38 |
| Issue number | 12 B |
| DOIs | |
| State | Published - 1999 |
| Externally published | Yes |
Keywords
- Actuator
- DFM
- Micro-force sensor
- Piezoelectric
- Sol-gel
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