Abstract
This paper investigates the effect of total dose radiation on the electrostatic potential distribution and the related short-channel effects (SCEs) of silicon-on-insulator (SOI) metal-oxide-semiconductor (MOS) devices with a vertical Gaussian doping profile. A new approximation of the 2-D potential function perpendicular to the channel for fully depleted SOI MOS field-effect transistors (FETs) is applied in the analytical threshold voltage model derivation. The impact of interface traps and oxide-trapped charge on the electrostatic potential profile, scaling, and SCEs are verified with TCAD simulations. The model agrees well with the experimental extractions of SCE in n-channel MOSFETs.
| Original language | English |
|---|---|
| Article number | 8434231 |
| Pages (from-to) | 2679-2690 |
| Number of pages | 12 |
| Journal | IEEE Transactions on Nuclear Science |
| Volume | 65 |
| Issue number | 10 |
| DOIs | |
| State | Published - Oct 2018 |
Keywords
- Fully depleted (FD) silicon-on-insulator (SOI)
- Gaussian
- interface trap
- short-channel effect (SCE)
- threshold voltage model
- total dose radiation
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