Three modes in a radio frequency atmospheric pressure glow discharge

J. J. Shi; X. T. Deng; R. Hall; J. D. Punnett; M. G. Kong

doi:10.1063/1.1622110

Three modes in a radio frequency atmospheric pressure glow discharge

J. J. Shi
, X. T. Deng
, R. Hall
, J. D. Punnett
, M. G. Kong

School of Chemical Engineering and Technology

Research output: Contribution to journal › Article › peer-review

125 Scopus citations

Abstract

A radio frequency atmospheric pressure glow discharge (APGD) was studied with measurement of discharge voltage, current, dissipated plasma power and plasma impedance. As the rf power was switched on and the matching impedance suitably set, a pale-purple glow was generated in the interelectrode gap. With increasing rf power, the pale glow evolved into a brighter and shrunken plasma channel. The dynamic evolution of rf APGD was characterized from the abnormal glow mode, through sheath breakdown, to the recovery mode.

Original language	English
Pages (from-to)	6303-6310
Number of pages	8
Journal	Journal of Applied Physics
Volume	94
Issue number	10
DOIs	https://doi.org/10.1063/1.1622110
State	Published - 15 Nov 2003

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10.1063/1.1622110

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abstract = "A radio frequency atmospheric pressure glow discharge (APGD) was studied with measurement of discharge voltage, current, dissipated plasma power and plasma impedance. As the rf power was switched on and the matching impedance suitably set, a pale-purple glow was generated in the interelectrode gap. With increasing rf power, the pale glow evolved into a brighter and shrunken plasma channel. The dynamic evolution of rf APGD was characterized from the abnormal glow mode, through sheath breakdown, to the recovery mode.",

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AU - Punnett, J. D.

AU - Kong, M. G.

PY - 2003/11/15

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N2 - A radio frequency atmospheric pressure glow discharge (APGD) was studied with measurement of discharge voltage, current, dissipated plasma power and plasma impedance. As the rf power was switched on and the matching impedance suitably set, a pale-purple glow was generated in the interelectrode gap. With increasing rf power, the pale glow evolved into a brighter and shrunken plasma channel. The dynamic evolution of rf APGD was characterized from the abnormal glow mode, through sheath breakdown, to the recovery mode.

AB - A radio frequency atmospheric pressure glow discharge (APGD) was studied with measurement of discharge voltage, current, dissipated plasma power and plasma impedance. As the rf power was switched on and the matching impedance suitably set, a pale-purple glow was generated in the interelectrode gap. With increasing rf power, the pale glow evolved into a brighter and shrunken plasma channel. The dynamic evolution of rf APGD was characterized from the abnormal glow mode, through sheath breakdown, to the recovery mode.

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M3 - 文章

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Three modes in a radio frequency atmospheric pressure glow discharge

Abstract

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