Three dimensional multilayer solenoid microcoils inside silica glass

Three dimensional (3D) solenoid microcoils could generate uniform magnetic field. Multilayer solenoid microcoils are highly pursued for strong magnetic field and high inductance in advanced magnetic microsystems. However, the fabrication of the 3D multilayer solenoid microcoils is still a challenging task. In this paper, 3D multilayer solenoid microcoils with uniform diameters and high aspect ratio were fabricated in silica glass. An alloy (Bi/In/Sn/Pb) with high melting point was chosen as the conductive metal to overcome the limitation of working temperature and improve the electrical property. The inductance of the three layers microcoils was measured, and the value is 77.71 nH at 100 kHz and 17.39 nH at 120 MHz. The quality factor was calculated, and it has a value of 5.02 at 120 MHz. This approach shows an improvement method to achieve complex 3D metal microstructures and electronic components, which could be widely integrated in advanced magnetic microsystems.