TY - JOUR
T1 - Thin film cracking and ratcheting caused by temperature cycling
AU - Huang, M.
AU - Suo, Z.
AU - Ma, Q.
AU - Fujimoto, H.
PY - 2000/6
Y1 - 2000/6
N2 - Layered materials are susceptible to failure upon temperature cycling. This paper describes an intriguing mechanism: cracking in a brittle layer caused by ratcheting in an adjacent ductile layer. For example, on a silicon die directly attached to an organic substrate, cracking often occurs in the silicon nitride film over aluminum pads. The silicon die and the organic substrate have different thermal expansion coefficients, inducing shear stresses at the die corners. Aided by cycling temperature, the shear stresses cause ratcheting in the aluminum pads. Incrementally, the stress relaxes in the aluminum pads and builds up in the overlaying silicon nitride film, leading to cracks.
AB - Layered materials are susceptible to failure upon temperature cycling. This paper describes an intriguing mechanism: cracking in a brittle layer caused by ratcheting in an adjacent ductile layer. For example, on a silicon die directly attached to an organic substrate, cracking often occurs in the silicon nitride film over aluminum pads. The silicon die and the organic substrate have different thermal expansion coefficients, inducing shear stresses at the die corners. Aided by cycling temperature, the shear stresses cause ratcheting in the aluminum pads. Incrementally, the stress relaxes in the aluminum pads and builds up in the overlaying silicon nitride film, leading to cracks.
UR - https://www.scopus.com/pages/publications/0034211118
U2 - 10.1557/JMR.2000.0177
DO - 10.1557/JMR.2000.0177
M3 - 文章
AN - SCOPUS:0034211118
SN - 0884-2914
VL - 15
SP - 1239
EP - 1242
JO - Journal of Materials Research
JF - Journal of Materials Research
IS - 6
ER -