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Thin film based flexible current sensor using a micropatterned Cu coil

Research output: Chapter in Book/Report/Conference proceedingConference contributionpeer-review

1 Scopus citations

Abstract

This paper reports a novel thin film based flexible clamp-on type current sensor with 250 turns micropatterned Cu coil (line/space = 50 μm/105 μm) formed by through-holes and flexible printed circuits (FPC) technologies for wireless sensor networks. Using flexible electronics techniques, microvias and fine stripe Cu patterns could be formed around 60-mm-long and 14.5-mm-wide permalloy film sandwiched between 40-mm-lomg and 20-mm-wide polyimide films with a high precision. Since the sensor has high flexibility, it can be used by winding the cable and drastically reduce the installation space. Furthermore, it can construct wireless sensor networks without external power supply because wireless nodes can drive by utilizing the secondary current generated in the coil of the sensor by the behavior of current transformer. Coil resistance between contact pads was about 241 Ω. The output voltage (V) changed linearly with variation of the value of primary current (Cp) in the 0 to 20 A range. Cp-F sensitivity was about 39.4 mV/A. The sensor can be fabricated by roll-to-roll FPC mass production facility because it is developed using only FPC technology.

Original languageEnglish
Title of host publicationSymposium on Design, Test, Integration and Packaging of MEMS/MOEMS, DTIP 2017
EditorsBenoit Charlot, Pascal Nouet, Claude Pellet, Yoshio Mita, Francis Pressecq, Peter Schneider, Stewart Smith
PublisherInstitute of Electrical and Electronics Engineers Inc.
ISBN (Electronic)9781538629529
DOIs
StatePublished - 18 Jul 2017
Externally publishedYes
Event19th Symposium on Design, Test, Integration and Packaging of MEMS/MOEMS, DTIP 2017 - Bordeaux, France
Duration: 29 May 20171 Jun 2017

Publication series

NameSymposium on Design, Test, Integration and Packaging of MEMS/MOEMS, DTIP 2017

Conference

Conference19th Symposium on Design, Test, Integration and Packaging of MEMS/MOEMS, DTIP 2017
Country/TerritoryFrance
CityBordeaux
Period29/05/171/06/17

Keywords

  • Current sensor
  • film
  • flexible coil
  • power monitoring
  • wireless sensor networks

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