Thickness effects on structures and electrical properties of lead zirconate titanate thick films

Peng Lin; Wei Ren; Xiaoqing Wu; Peng Shi; Xiaofeng Chen; Xi Yao

doi:10.1016/j.ceramint.2007.09.052

Thickness effects on structures and electrical properties of lead zirconate titanate thick films

Peng Lin
, Wei Ren
, Xiaoqing Wu
, Peng Shi
, Xiaofeng Chen
, Xi Yao

Key Lab of the Ministry of Education for Process Control and Efficiency Egineering

Research output: Contribution to journal › Article › peer-review

18 Scopus citations

Abstract

PbZr_0.52Ti_0.48O₃ thick films with thickness of 1-6 μm have been prepared by a polymer-assisted MOD process. The polymer, poly(vinyl acetate) (PVAc) was introduced into PZT precursor solutions. The grain size increased from 30 nm to 100 nm with an increase of the additive amount of PVAc. Meanwhile, the grains grew larger (in a range of 100-500 nm) and the surface of the films became rougher with increasing film thickness. This promotes the structural relaxation and prevents cracking formation. The critical thickness at which the film begins to crack increases significantly. The dielectric constant and remanent polarization (P_r) increased from 1070 to 1490 and from 36.1 μC/cm² to 52.4 μC/cm², respectively, and the coercive field (E_c) decreased from 57.3 kV/cm to 41.3 kV/cm as the film thickness increased from 0.95 μm to 6.02 μm. PZT thick films prepared in this study are promising materials for MEMS applications.

Original language	English
Pages (from-to)	991-995
Number of pages	5
Journal	Ceramics International
Volume	34
Issue number	4
DOIs	https://doi.org/10.1016/j.ceramint.2007.09.052
State	Published - May 2008
Externally published	Yes

Keywords

C. Electrical properties
D. PZT films
MEMS
MOD process

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10.1016/j.ceramint.2007.09.052

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title = "Thickness effects on structures and electrical properties of lead zirconate titanate thick films",

abstract = "PbZr0.52Ti0.48O3 thick films with thickness of 1-6 μm have been prepared by a polymer-assisted MOD process. The polymer, poly(vinyl acetate) (PVAc) was introduced into PZT precursor solutions. The grain size increased from 30 nm to 100 nm with an increase of the additive amount of PVAc. Meanwhile, the grains grew larger (in a range of 100-500 nm) and the surface of the films became rougher with increasing film thickness. This promotes the structural relaxation and prevents cracking formation. The critical thickness at which the film begins to crack increases significantly. The dielectric constant and remanent polarization (Pr) increased from 1070 to 1490 and from 36.1 μC/cm2 to 52.4 μC/cm2, respectively, and the coercive field (Ec) decreased from 57.3 kV/cm to 41.3 kV/cm as the film thickness increased from 0.95 μm to 6.02 μm. PZT thick films prepared in this study are promising materials for MEMS applications.",

keywords = "C. Electrical properties, D. PZT films, MEMS, MOD process",

author = "Peng Lin and Wei Ren and Xiaoqing Wu and Peng Shi and Xiaofeng Chen and Xi Yao",

year = "2008",

month = may,

doi = "10.1016/j.ceramint.2007.09.052",

language = "英语",

volume = "34",

pages = "991--995",

journal = "Ceramics International",

issn = "0272-8842",

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TY - JOUR

T1 - Thickness effects on structures and electrical properties of lead zirconate titanate thick films

AU - Lin, Peng

AU - Ren, Wei

AU - Wu, Xiaoqing

AU - Shi, Peng

AU - Chen, Xiaofeng

AU - Yao, Xi

PY - 2008/5

Y1 - 2008/5

N2 - PbZr0.52Ti0.48O3 thick films with thickness of 1-6 μm have been prepared by a polymer-assisted MOD process. The polymer, poly(vinyl acetate) (PVAc) was introduced into PZT precursor solutions. The grain size increased from 30 nm to 100 nm with an increase of the additive amount of PVAc. Meanwhile, the grains grew larger (in a range of 100-500 nm) and the surface of the films became rougher with increasing film thickness. This promotes the structural relaxation and prevents cracking formation. The critical thickness at which the film begins to crack increases significantly. The dielectric constant and remanent polarization (Pr) increased from 1070 to 1490 and from 36.1 μC/cm2 to 52.4 μC/cm2, respectively, and the coercive field (Ec) decreased from 57.3 kV/cm to 41.3 kV/cm as the film thickness increased from 0.95 μm to 6.02 μm. PZT thick films prepared in this study are promising materials for MEMS applications.

AB - PbZr0.52Ti0.48O3 thick films with thickness of 1-6 μm have been prepared by a polymer-assisted MOD process. The polymer, poly(vinyl acetate) (PVAc) was introduced into PZT precursor solutions. The grain size increased from 30 nm to 100 nm with an increase of the additive amount of PVAc. Meanwhile, the grains grew larger (in a range of 100-500 nm) and the surface of the films became rougher with increasing film thickness. This promotes the structural relaxation and prevents cracking formation. The critical thickness at which the film begins to crack increases significantly. The dielectric constant and remanent polarization (Pr) increased from 1070 to 1490 and from 36.1 μC/cm2 to 52.4 μC/cm2, respectively, and the coercive field (Ec) decreased from 57.3 kV/cm to 41.3 kV/cm as the film thickness increased from 0.95 μm to 6.02 μm. PZT thick films prepared in this study are promising materials for MEMS applications.

KW - C. Electrical properties

KW - D. PZT films

KW - MEMS

KW - MOD process

UR - https://www.scopus.com/pages/publications/42649103318

U2 - 10.1016/j.ceramint.2007.09.052

DO - 10.1016/j.ceramint.2007.09.052

M3 - 文章

AN - SCOPUS:42649103318

SN - 0272-8842

VL - 34

SP - 991

EP - 995

JO - Ceramics International

JF - Ceramics International

IS - 4

ER -

Thickness effects on structures and electrical properties of lead zirconate titanate thick films

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Keywords

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