Thermal conductivity of porous SiO2 films on silicon substrate by laser flashing

Yun Liu; Wensheng Shi; Wei Ren; Liangying Zhang; Xi Yao

Thermal conductivity of porous SiO₂ films on silicon substrate by laser flashing

Yun Liu
, Wensheng Shi
, Wei Ren
, Liangying Zhang
, Xi Yao

Faculty of Electronic and Information Engineering

Xi'an Jiaotong University

Research output: Contribution to journal › Article › peer-review

1 Scopus citations

Abstract

A laser flash method for the measurement of longitudinal thermal conductivity of porous films is proposed. The results show that the thermal conductivity of SiO₂'s thin films is lower than that of the bulk silica. The thermal conductivity of porous SiO₂ films decreases with increasing porosity. It is about 0.11 W/m·K for 40% porosity by the sol-gel process.

Original language	English
Pages (from-to)	105-107, 110
Journal	Hsi-An Chiao Tung Ta Hsueh/Journal of Xi'an Jiaotong University
Volume	32
Issue number	9
State	Published - 1998

Cite this

@article{fc62e3dc996b4458bc31e55f3edeabf9,

title = "Thermal conductivity of porous SiO2 films on silicon substrate by laser flashing",

abstract = "A laser flash method for the measurement of longitudinal thermal conductivity of porous films is proposed. The results show that the thermal conductivity of SiO2's thin films is lower than that of the bulk silica. The thermal conductivity of porous SiO2 films decreases with increasing porosity. It is about 0.11 W/m·K for 40\% porosity by the sol-gel process.",

author = "Yun Liu and Wensheng Shi and Wei Ren and Liangying Zhang and Xi Yao",

year = "1998",

language = "英语",

volume = "32",

pages = "105--107, 110",

journal = "Hsi-An Chiao Tung Ta Hsueh/Journal of Xi'an Jiaotong University",

issn = "0253-987X",

publisher = "Xi'an Jiaotong University",

number = "9",

}

TY - JOUR

T1 - Thermal conductivity of porous SiO2 films on silicon substrate by laser flashing

AU - Liu, Yun

AU - Shi, Wensheng

AU - Ren, Wei

AU - Zhang, Liangying

AU - Yao, Xi

PY - 1998

Y1 - 1998

N2 - A laser flash method for the measurement of longitudinal thermal conductivity of porous films is proposed. The results show that the thermal conductivity of SiO2's thin films is lower than that of the bulk silica. The thermal conductivity of porous SiO2 films decreases with increasing porosity. It is about 0.11 W/m·K for 40% porosity by the sol-gel process.

AB - A laser flash method for the measurement of longitudinal thermal conductivity of porous films is proposed. The results show that the thermal conductivity of SiO2's thin films is lower than that of the bulk silica. The thermal conductivity of porous SiO2 films decreases with increasing porosity. It is about 0.11 W/m·K for 40% porosity by the sol-gel process.

UR - https://www.scopus.com/pages/publications/0032266965

M3 - 文章

AN - SCOPUS:0032266965

SN - 0253-987X

VL - 32

SP - 105-107, 110

JO - Hsi-An Chiao Tung Ta Hsueh/Journal of Xi'an Jiaotong University

JF - Hsi-An Chiao Tung Ta Hsueh/Journal of Xi'an Jiaotong University

IS - 9

ER -

Thermal conductivity of porous SiO₂ films on silicon substrate by laser flashing

Abstract

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