The surface mapping and crystal orientation of body-centered cubic thin metal tungsten films of different thickness

Body-centered cubic (BCC) W films of different thickness were deposited on Si (100) substrate by magnetron sputtering and then annealed in vacuum at 400°C for an hour. An investigation of the crystalline orientation and surface morphology evolution of the annealed W thin films suggests that the change of film texture coefficient T₁₁₀ depends on the competition between the strain and surface energy. The surface structure evolution of annealed W thin films of different thickness reflects the competition between the strain energy and the surface energy. In addition, the correlation between the texture coefficient T₁₁₀ and the surface structure anisotropy of the thin films is established by an approach of integrating the discrete wavelet transform and fractal geometry concepts.