@inproceedings{52051e679f8745e59a8bce9b47cba534,
title = "The study of acceleration effect for piezoresistive micro pressure sensor",
abstract = "This paper reports the acceleration effect of a type of piezoresistive pressure sensor for micro-pressure measurement with a cross beam-membrane (CBM) structure. By using the finite element method (FEM) to analyze the stress distribution of the CBM structure and compared with the traditional structures under acceleration signals. Our results show that the sensitivity and linearity of the CBM is better than other structures, but also the acceleration disturb analysis indicating that the CBM structure offers low acceleration interference for micro-pressure measurement in vibration environments.",
keywords = "Lateral effect, Micro pressure, Piezoresistive",
author = "Bian Tian and Zhao, \{Yu Long\} and Zhe Niu",
year = "2014",
doi = "10.4028/www.scientific.net/AMM.455.455",
language = "英语",
isbn = "9783037859223",
series = "Applied Mechanics and Materials",
pages = "455--459",
booktitle = "Mechanical Materials and Manufacturing Engineering III",
note = "2013 3rd International Conference on Mechanical Materials and Manufacturing Engineering, ICMMME 2013 ; Conference date: 01-10-2013 Through 02-10-2013",
}