The optimized design of piezoelectric diaphragm and its application in micropump

Wei Wang; Xiao Wei Liu; Wei Ping Chen; Zhi Yong Bao

The optimized design of piezoelectric diaphragm and its application in micropump

Wei Wang
, Xiao Wei Liu
, Wei Ping Chen
, Zhi Yong Bao

Harbin Institute of Technology

Research output: Contribution to journal › Article › peer-review

2 Scopus citations

Abstract

Piezoelectric actuator is one of the most development prospects in MEMS actuators. Based on AN-SYS, finite element method software, the assemble methods and structure parameters of piezoelectric diaphragm were designed and optimized. The optimized parameters for structures of PZT/Si and PZT/Cu were obtained and used in fabrication of the micopump with valve. The simulation of piezoelectric actuator effect of the micropump is in accord with the results of the test. The back pressure of the micropump is 836 Pa, and flux is 1.4 mL/min.

Original language	English
Pages (from-to)	153-155+158
Journal	Yadian Yu Shengguang/Piezoelectrics and Acoustooptics
Volume	28
Issue number	2
State	Published - Apr 2006
Externally published	Yes

Keywords

Diaphragm
MEMS actuator
Micropump
Piezoelectric actuator
Simulation

Cite this

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title = "The optimized design of piezoelectric diaphragm and its application in micropump",

abstract = "Piezoelectric actuator is one of the most development prospects in MEMS actuators. Based on AN-SYS, finite element method software, the assemble methods and structure parameters of piezoelectric diaphragm were designed and optimized. The optimized parameters for structures of PZT/Si and PZT/Cu were obtained and used in fabrication of the micopump with valve. The simulation of piezoelectric actuator effect of the micropump is in accord with the results of the test. The back pressure of the micropump is 836 Pa, and flux is 1.4 mL/min.",

keywords = "Diaphragm, MEMS actuator, Micropump, Piezoelectric actuator, Simulation",

author = "Wei Wang and Liu, \{Xiao Wei\} and Chen, \{Wei Ping\} and Bao, \{Zhi Yong\}",

year = "2006",

month = apr,

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volume = "28",

pages = "153--155+158",

journal = "Yadian Yu Shengguang/Piezoelectrics and Acoustooptics",

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number = "2",

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T1 - The optimized design of piezoelectric diaphragm and its application in micropump

AU - Wang, Wei

AU - Liu, Xiao Wei

AU - Chen, Wei Ping

AU - Bao, Zhi Yong

PY - 2006/4

Y1 - 2006/4

N2 - Piezoelectric actuator is one of the most development prospects in MEMS actuators. Based on AN-SYS, finite element method software, the assemble methods and structure parameters of piezoelectric diaphragm were designed and optimized. The optimized parameters for structures of PZT/Si and PZT/Cu were obtained and used in fabrication of the micopump with valve. The simulation of piezoelectric actuator effect of the micropump is in accord with the results of the test. The back pressure of the micropump is 836 Pa, and flux is 1.4 mL/min.

AB - Piezoelectric actuator is one of the most development prospects in MEMS actuators. Based on AN-SYS, finite element method software, the assemble methods and structure parameters of piezoelectric diaphragm were designed and optimized. The optimized parameters for structures of PZT/Si and PZT/Cu were obtained and used in fabrication of the micopump with valve. The simulation of piezoelectric actuator effect of the micropump is in accord with the results of the test. The back pressure of the micropump is 836 Pa, and flux is 1.4 mL/min.

KW - Diaphragm

KW - MEMS actuator

KW - Micropump

KW - Piezoelectric actuator

KW - Simulation

UR - https://www.scopus.com/pages/publications/33646751705

M3 - 文章

AN - SCOPUS:33646751705

SN - 1004-2474

VL - 28

SP - 153-155+158

JO - Yadian Yu Shengguang/Piezoelectrics and Acoustooptics

JF - Yadian Yu Shengguang/Piezoelectrics and Acoustooptics

IS - 2

ER -

The optimized design of piezoelectric diaphragm and its application in micropump

Abstract

Keywords

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