The effect of Zr on the microstructure of Ba(Ti_1-yZr_y) O₃ thin films prepared by chemical-solution deposition

The micro structure of BaTi_1-y Zr_yO₃ (y = 0, 0.15, 0.3) thin films prepared by a chemical-solution deposition technique has been studied by means of transmission electron microscopy. In the BaTiO₃ films, grains and cavities are polyhedral in shape. Twins and stacking faults occur. Some of them terminate in the interior of a grain. A substitution of Ti by Zr in BaTiO₃ makes the grains and cavities round and suppresses the formation of the twins and stacking faults. With a Zr content of y = 0.3 the film becomes free of twin and stacking faults and exhibits a columnar grain morphology.