The design and manufacture of functional micro-stationary PCR chip

Jinquan Nie; Yulong Zhao; Yimin Liu; Keyin Liu; Niancai Peng

doi:10.1007/978-3-642-21666-4_44

The design and manufacture of functional micro-stationary PCR chip

Jinquan Nie
, Yulong Zhao
, Yimin Liu
, Keyin Liu
, Niancai Peng

Xi'an Jiaotong University

Research output: Chapter in Book/Report/Conference proceeding › Conference contribution › peer-review

1 Scopus citations

Abstract

This study presents a novel microfabricated polymerase chain reaction (PCR) chip based on silicon. A microheater utilizing doped semiconductors as heating resistors and a temperature sensor made of Pt are integrated on the chip to make up a thermal module. The micro-stationary PCR chip is fabricated on a silicon wafer using photolithography, wet etching and ion implantation technology. The package is created without complex processes. Three types of configurations for the microheater are designed and simulated to analyze the temperature distribution by the finite element analysis so as to enhance the temperature uniformity in the reaction chamber. With this approach, the microheater is optimized. Finally, the simulation results are validated by infrared images from experiments.

Original language	English
Title of host publication	Universal Access in Human-Computer Interaction
Subtitle of host publication	Context Diversity - 6th International Conference, UAHCI 2011, Held as Part of HCI International 2011, Proceedings
Publisher	Springer Verlag
Pages	398-404
Number of pages	7
Edition	PART 3
ISBN (Print)	9783642216657
DOIs	https://doi.org/10.1007/978-3-642-21666-4_44
State	Published - 2011

Publication series

Name	Lecture Notes in Computer Science (including subseries Lecture Notes in Artificial Intelligence and Lecture Notes in Bioinformatics)
Number	PART 3
Volume	6767 LNCS
ISSN (Print)	0302-9743
ISSN (Electronic)	1611-3349

Keywords

doped semiconductor
MEMS
PCR
temperature distribution
temperature uniformity

Access to Document

10.1007/978-3-642-21666-4_44

Cite this

Nie, J., Zhao, Y., Liu, Y., Liu, K., & Peng, N. (2011). The design and manufacture of functional micro-stationary PCR chip. In Universal Access in Human-Computer Interaction: Context Diversity - 6th International Conference, UAHCI 2011, Held as Part of HCI International 2011, Proceedings (PART 3 ed., pp. 398-404). (Lecture Notes in Computer Science (including subseries Lecture Notes in Artificial Intelligence and Lecture Notes in Bioinformatics); Vol. 6767 LNCS, No. PART 3). Springer Verlag. https://doi.org/10.1007/978-3-642-21666-4_44

Nie, Jinquan ; Zhao, Yulong ; Liu, Yimin et al. / The design and manufacture of functional micro-stationary PCR chip. Universal Access in Human-Computer Interaction: Context Diversity - 6th International Conference, UAHCI 2011, Held as Part of HCI International 2011, Proceedings. PART 3. ed. Springer Verlag, 2011. pp. 398-404 (Lecture Notes in Computer Science (including subseries Lecture Notes in Artificial Intelligence and Lecture Notes in Bioinformatics); PART 3).

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abstract = "This study presents a novel microfabricated polymerase chain reaction (PCR) chip based on silicon. A microheater utilizing doped semiconductors as heating resistors and a temperature sensor made of Pt are integrated on the chip to make up a thermal module. The micro-stationary PCR chip is fabricated on a silicon wafer using photolithography, wet etching and ion implantation technology. The package is created without complex processes. Three types of configurations for the microheater are designed and simulated to analyze the temperature distribution by the finite element analysis so as to enhance the temperature uniformity in the reaction chamber. With this approach, the microheater is optimized. Finally, the simulation results are validated by infrared images from experiments.",

keywords = "doped semiconductor, MEMS, PCR, temperature distribution, temperature uniformity",

author = "Jinquan Nie and Yulong Zhao and Yimin Liu and Keyin Liu and Niancai Peng",

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doi = "10.1007/978-3-642-21666-4\_44",

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series = "Lecture Notes in Computer Science (including subseries Lecture Notes in Artificial Intelligence and Lecture Notes in Bioinformatics)",

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Nie, J, Zhao, Y, Liu, Y, Liu, K & Peng, N 2011, The design and manufacture of functional micro-stationary PCR chip. in Universal Access in Human-Computer Interaction: Context Diversity - 6th International Conference, UAHCI 2011, Held as Part of HCI International 2011, Proceedings. PART 3 edn, Lecture Notes in Computer Science (including subseries Lecture Notes in Artificial Intelligence and Lecture Notes in Bioinformatics), no. PART 3, vol. 6767 LNCS, Springer Verlag, pp. 398-404. https://doi.org/10.1007/978-3-642-21666-4_44

The design and manufacture of functional micro-stationary PCR chip. / Nie, Jinquan; Zhao, Yulong; Liu, Yimin et al.
Universal Access in Human-Computer Interaction: Context Diversity - 6th International Conference, UAHCI 2011, Held as Part of HCI International 2011, Proceedings. PART 3. ed. Springer Verlag, 2011. p. 398-404 (Lecture Notes in Computer Science (including subseries Lecture Notes in Artificial Intelligence and Lecture Notes in Bioinformatics); Vol. 6767 LNCS, No. PART 3).

Research output: Chapter in Book/Report/Conference proceeding › Conference contribution › peer-review

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N2 - This study presents a novel microfabricated polymerase chain reaction (PCR) chip based on silicon. A microheater utilizing doped semiconductors as heating resistors and a temperature sensor made of Pt are integrated on the chip to make up a thermal module. The micro-stationary PCR chip is fabricated on a silicon wafer using photolithography, wet etching and ion implantation technology. The package is created without complex processes. Three types of configurations for the microheater are designed and simulated to analyze the temperature distribution by the finite element analysis so as to enhance the temperature uniformity in the reaction chamber. With this approach, the microheater is optimized. Finally, the simulation results are validated by infrared images from experiments.

AB - This study presents a novel microfabricated polymerase chain reaction (PCR) chip based on silicon. A microheater utilizing doped semiconductors as heating resistors and a temperature sensor made of Pt are integrated on the chip to make up a thermal module. The micro-stationary PCR chip is fabricated on a silicon wafer using photolithography, wet etching and ion implantation technology. The package is created without complex processes. Three types of configurations for the microheater are designed and simulated to analyze the temperature distribution by the finite element analysis so as to enhance the temperature uniformity in the reaction chamber. With this approach, the microheater is optimized. Finally, the simulation results are validated by infrared images from experiments.

KW - doped semiconductor

KW - MEMS

KW - PCR

KW - temperature distribution

KW - temperature uniformity

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ER -

Nie J, Zhao Y, Liu Y, Liu K, Peng N. The design and manufacture of functional micro-stationary PCR chip. In Universal Access in Human-Computer Interaction: Context Diversity - 6th International Conference, UAHCI 2011, Held as Part of HCI International 2011, Proceedings. PART 3 ed. Springer Verlag. 2011. p. 398-404. (Lecture Notes in Computer Science (including subseries Lecture Notes in Artificial Intelligence and Lecture Notes in Bioinformatics); PART 3). doi: 10.1007/978-3-642-21666-4_44

The design and manufacture of functional micro-stationary PCR chip

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