The design and fabrication of implanted intracranial pressure sensor

For the purpose of intracranial pressure measurement, implantable intracranial pressure monitoring sensor applying to the long-term and real-time monitoring to the intracranial pressure of the brain patients, a pressure sensor was designed based on the piezoresistive principle. The fabrication of pressure sensor adopted the technology of bulk micromachining to form the structure, and used the ion implanted technique to form resistances. The packaging was successfully fabricated by using biocompatible material, such as titanium alloy and polyurethane. The output characteristic of the sensor is measured. It was demonstrated that this pressure sensor has good performance, include linearity, accuracy and sensitivity for medical applications.