The bottom-up chemical growth of ZnO NRs on patterned IDEs and its potential application as micro-structured sensors

  • Yanhua Shi
  • , Minqiang Wang
  • , Can Hong
  • , Zhi Yang
  • , Lanlan Wang
  • , Hongzhong Liu

Research output: Chapter in Book/Report/Conference proceedingConference contributionpeer-review

Abstract

ZnO nanorods (NRs) micro-structured Sensors utilizing integration of ZnO NRs on microscale interdigitated electrodes (μIDEs) was fabricated and characterized. The ZnO NRs has been grown by simple CBD method directly on the IDEs which were formed on glass substrates by conventional photolithography and magnetron sputtering techniques. The average diameter of the ZnO NRs can be about 40-100 nm, and the length can be varied from 1 to 8 μm by changing growth systems and controlling growth time. When gas targets, such as ethanol, bind onto the ZnO NRs, the conductance between IDEs will change. Clear responses were obtained by measuring and comparing current-voltage (I-V) characteristic of the sensor before and after adsorbing gases.

Original languageEnglish
Title of host publication2012 12th IEEE International Conference on Nanotechnology, NANO 2012
DOIs
StatePublished - 2012
Event2012 12th IEEE International Conference on Nanotechnology, NANO 2012 - Birmingham, United Kingdom
Duration: 20 Aug 201223 Aug 2012

Publication series

NameProceedings of the IEEE Conference on Nanotechnology
ISSN (Print)1944-9399
ISSN (Electronic)1944-9380

Conference

Conference2012 12th IEEE International Conference on Nanotechnology, NANO 2012
Country/TerritoryUnited Kingdom
CityBirmingham
Period20/08/1223/08/12

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