TY - GEN
T1 - The bottom-up chemical growth of ZnO NRs on patterned IDEs and its potential application as micro-structured sensors
AU - Shi, Yanhua
AU - Wang, Minqiang
AU - Hong, Can
AU - Yang, Zhi
AU - Wang, Lanlan
AU - Liu, Hongzhong
PY - 2012
Y1 - 2012
N2 - ZnO nanorods (NRs) micro-structured Sensors utilizing integration of ZnO NRs on microscale interdigitated electrodes (μIDEs) was fabricated and characterized. The ZnO NRs has been grown by simple CBD method directly on the IDEs which were formed on glass substrates by conventional photolithography and magnetron sputtering techniques. The average diameter of the ZnO NRs can be about 40-100 nm, and the length can be varied from 1 to 8 μm by changing growth systems and controlling growth time. When gas targets, such as ethanol, bind onto the ZnO NRs, the conductance between IDEs will change. Clear responses were obtained by measuring and comparing current-voltage (I-V) characteristic of the sensor before and after adsorbing gases.
AB - ZnO nanorods (NRs) micro-structured Sensors utilizing integration of ZnO NRs on microscale interdigitated electrodes (μIDEs) was fabricated and characterized. The ZnO NRs has been grown by simple CBD method directly on the IDEs which were formed on glass substrates by conventional photolithography and magnetron sputtering techniques. The average diameter of the ZnO NRs can be about 40-100 nm, and the length can be varied from 1 to 8 μm by changing growth systems and controlling growth time. When gas targets, such as ethanol, bind onto the ZnO NRs, the conductance between IDEs will change. Clear responses were obtained by measuring and comparing current-voltage (I-V) characteristic of the sensor before and after adsorbing gases.
UR - https://www.scopus.com/pages/publications/84869167868
U2 - 10.1109/NANO.2012.6322019
DO - 10.1109/NANO.2012.6322019
M3 - 会议稿件
AN - SCOPUS:84869167868
SN - 9781467321983
T3 - Proceedings of the IEEE Conference on Nanotechnology
BT - 2012 12th IEEE International Conference on Nanotechnology, NANO 2012
T2 - 2012 12th IEEE International Conference on Nanotechnology, NANO 2012
Y2 - 20 August 2012 through 23 August 2012
ER -