The analysis and structural design of micro SOl pressure sensors

Bian Tian; Yulong Zhao; Zhuangde Jiang; Ling Zhang; Nansheng Liao; Yuanhao Liu; Chao Meng

doi:10.1109/NEMS.2009.5068526

The analysis and structural design of micro SOl pressure sensors

Bian Tian
, Yulong Zhao
, Zhuangde Jiang
, Ling Zhang
, Nansheng Liao
, Yuanhao Liu
, Chao Meng

School of Mechanical Engineering

Xi'an Jiaotong University

Research output: Chapter in Book/Report/Conference proceeding › Conference contribution › peer-review

13 Scopus citations

Abstract

A kind of micro piezoresistive pressure sensor with stable performances under high temperature is designed based on the silicon on insulator (SOl). Through analyzing the stress distribution of diaphragm by finite element method (FEM), the model of structure was established. The fabrication operated on SOl wafer, which can be used in extreme high temperature environments, and applied the technology of anisotropy chemical etching. Performances of this kind of SOl piezoresistive sensor, including size, sensitivity, and temperature were investigated. The result shows that the precision is O.57% FS. Therefore, this kind of design not only has smaller size, simplicity preparation but also has high sensitivity, temperature coefficient and accuracy.

Original language	English
Title of host publication	4th IEEE International Conference on Nano/Micro Engineered and Molecular Systems, NEMS 2009
Pages	55-58
Number of pages	4
DOIs	https://doi.org/10.1109/NEMS.2009.5068526
State	Published - 2009
Event	4th IEEE International Conference on Nano/Micro Engineered and Molecular Systems, NEMS 2009 - Shenzhen, China Duration: 5 Jan 2009 → 8 Jan 2009

Publication series

Name	4th IEEE International Conference on Nano/Micro Engineered and Molecular Systems, NEMS 2009

Conference

Conference	4th IEEE International Conference on Nano/Micro Engineered and Molecular Systems, NEMS 2009
Country/Territory	China
City	Shenzhen
Period	5/01/09 → 8/01/09

Keywords

FEM
High temperature
Pressure
SOI

Access to Document

10.1109/NEMS.2009.5068526

Cite this

Tian, B., Zhao, Y., Jiang, Z., Zhang, L., Liao, N., Liu, Y., & Meng, C. (2009). The analysis and structural design of micro SOl pressure sensors. In 4th IEEE International Conference on Nano/Micro Engineered and Molecular Systems, NEMS 2009 (pp. 55-58). Article 5068526 (4th IEEE International Conference on Nano/Micro Engineered and Molecular Systems, NEMS 2009). https://doi.org/10.1109/NEMS.2009.5068526

@inproceedings{a24c17c31ce14ed3a3815ddc3896a044,

title = "The analysis and structural design of micro SOl pressure sensors",

abstract = "A kind of micro piezoresistive pressure sensor with stable performances under high temperature is designed based on the silicon on insulator (SOl). Through analyzing the stress distribution of diaphragm by finite element method (FEM), the model of structure was established. The fabrication operated on SOl wafer, which can be used in extreme high temperature environments, and applied the technology of anisotropy chemical etching. Performances of this kind of SOl piezoresistive sensor, including size, sensitivity, and temperature were investigated. The result shows that the precision is O.57\% FS. Therefore, this kind of design not only has smaller size, simplicity preparation but also has high sensitivity, temperature coefficient and accuracy.",

keywords = "FEM, High temperature, Pressure, SOI",

author = "Bian Tian and Yulong Zhao and Zhuangde Jiang and Ling Zhang and Nansheng Liao and Yuanhao Liu and Chao Meng",

year = "2009",

doi = "10.1109/NEMS.2009.5068526",

language = "英语",

isbn = "9781424446308",

series = "4th IEEE International Conference on Nano/Micro Engineered and Molecular Systems, NEMS 2009",

pages = "55--58",

booktitle = "4th IEEE International Conference on Nano/Micro Engineered and Molecular Systems, NEMS 2009",

note = "4th IEEE International Conference on Nano/Micro Engineered and Molecular Systems, NEMS 2009 ; Conference date: 05-01-2009 Through 08-01-2009",

}

Tian, B , Zhao, Y , Jiang, Z, Zhang, L, Liao, N, Liu, Y & Meng, C 2009, The analysis and structural design of micro SOl pressure sensors. in 4th IEEE International Conference on Nano/Micro Engineered and Molecular Systems, NEMS 2009., 5068526, 4th IEEE International Conference on Nano/Micro Engineered and Molecular Systems, NEMS 2009, pp. 55-58, 4th IEEE International Conference on Nano/Micro Engineered and Molecular Systems, NEMS 2009, Shenzhen, China, 5/01/09. https://doi.org/10.1109/NEMS.2009.5068526

The analysis and structural design of micro SOl pressure sensors. / Tian, Bian ; Zhao, Yulong ; Jiang, Zhuangde et al.
4th IEEE International Conference on Nano/Micro Engineered and Molecular Systems, NEMS 2009. 2009. p. 55-58 5068526 (4th IEEE International Conference on Nano/Micro Engineered and Molecular Systems, NEMS 2009).

Research output: Chapter in Book/Report/Conference proceeding › Conference contribution › peer-review

TY - GEN

T1 - The analysis and structural design of micro SOl pressure sensors

AU - Tian, Bian

AU - Zhao, Yulong

AU - Jiang, Zhuangde

AU - Zhang, Ling

AU - Liao, Nansheng

AU - Liu, Yuanhao

AU - Meng, Chao

PY - 2009

Y1 - 2009

N2 - A kind of micro piezoresistive pressure sensor with stable performances under high temperature is designed based on the silicon on insulator (SOl). Through analyzing the stress distribution of diaphragm by finite element method (FEM), the model of structure was established. The fabrication operated on SOl wafer, which can be used in extreme high temperature environments, and applied the technology of anisotropy chemical etching. Performances of this kind of SOl piezoresistive sensor, including size, sensitivity, and temperature were investigated. The result shows that the precision is O.57% FS. Therefore, this kind of design not only has smaller size, simplicity preparation but also has high sensitivity, temperature coefficient and accuracy.

AB - A kind of micro piezoresistive pressure sensor with stable performances under high temperature is designed based on the silicon on insulator (SOl). Through analyzing the stress distribution of diaphragm by finite element method (FEM), the model of structure was established. The fabrication operated on SOl wafer, which can be used in extreme high temperature environments, and applied the technology of anisotropy chemical etching. Performances of this kind of SOl piezoresistive sensor, including size, sensitivity, and temperature were investigated. The result shows that the precision is O.57% FS. Therefore, this kind of design not only has smaller size, simplicity preparation but also has high sensitivity, temperature coefficient and accuracy.

KW - FEM

KW - High temperature

KW - Pressure

KW - SOI

UR - https://www.scopus.com/pages/publications/70349656112

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DO - 10.1109/NEMS.2009.5068526

M3 - 会议稿件

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SN - 9781424446308

T3 - 4th IEEE International Conference on Nano/Micro Engineered and Molecular Systems, NEMS 2009

SP - 55

EP - 58

BT - 4th IEEE International Conference on Nano/Micro Engineered and Molecular Systems, NEMS 2009

T2 - 4th IEEE International Conference on Nano/Micro Engineered and Molecular Systems, NEMS 2009

Y2 - 5 January 2009 through 8 January 2009

ER -

The analysis and structural design of micro SOl pressure sensors

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