Technical committee of commercialization of MEMS and nanofabrication

Research output: Contribution to journal › Comment/debate

Original language	English
Pages (from-to)	1149-1152
Number of pages	4
Journal	Seimitsu Kogaku Kaishi/Journal of the Japan Society for Precision Engineering
Volume	75
Issue number	10
DOIs	https://doi.org/10.2493/jjspe.75.1149
State	Published - Oct 2009

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@article{e06c83c6715b4cd8900cb32121e88342,

title = "Technical committee of commercialization of MEMS and nanofabrication",

author = "Ryutaro Maeda and Takashi Usuda",

year = "2009",

month = oct,

doi = "10.2493/jjspe.75.1149",

language = "英语",

volume = "75",

pages = "1149--1152",

journal = "Seimitsu Kogaku Kaishi/Journal of the Japan Society for Precision Engineering",

issn = "0912-0289",

publisher = "Japan Society for Precision Engineering",

number = "10",

}

TY - JOUR

T1 - Technical committee of commercialization of MEMS and nanofabrication

AU - Maeda, Ryutaro

AU - Usuda, Takashi

PY - 2009/10

Y1 - 2009/10

UR - https://www.scopus.com/pages/publications/77955436741

U2 - 10.2493/jjspe.75.1149

DO - 10.2493/jjspe.75.1149

M3 - 评论/辩论

AN - SCOPUS:77955436741

SN - 0912-0289

VL - 75

SP - 1149

EP - 1152

JO - Seimitsu Kogaku Kaishi/Journal of the Japan Society for Precision Engineering

JF - Seimitsu Kogaku Kaishi/Journal of the Japan Society for Precision Engineering

IS - 10

ER -