TY - GEN
T1 - Target Transfer of Ferroelectric Thin Films for Electro-Optic Modulation on SOI Platform
AU - Tao, Mengxue
AU - Zhang, Butong
AU - Zhao, Tianxiang
AU - Wu, Xiaoxuan
AU - Liu, Ming
AU - Dong, Guohua
AU - Wang, Junjia
N1 - Publisher Copyright:
© 2023 IEEE.
PY - 2023
Y1 - 2023
N2 - Electro-optical modulators play an essential role in high-capacity fiber optic transmission systems and high-speed optoelectronic information processing systems. In this work, we demonstrate target transfer of ferroelectric thin films for electro-optic modulation on SOI platform. Our BTO hybrid integrated MZI modulator has exhibited a Vπ L as low as 1.67 V• cm, and the PTO hybrid integrated micro-ring modulator exhibits an effective electro-optical coefficient reff as 6 pm/V, which open up new possibilities and approaches for implementing compact electro-optical modulators.
AB - Electro-optical modulators play an essential role in high-capacity fiber optic transmission systems and high-speed optoelectronic information processing systems. In this work, we demonstrate target transfer of ferroelectric thin films for electro-optic modulation on SOI platform. Our BTO hybrid integrated MZI modulator has exhibited a Vπ L as low as 1.67 V• cm, and the PTO hybrid integrated micro-ring modulator exhibits an effective electro-optical coefficient reff as 6 pm/V, which open up new possibilities and approaches for implementing compact electro-optical modulators.
KW - Pockels effects
KW - ferroelectric thin films
KW - hybrid integrated modulators
UR - https://www.scopus.com/pages/publications/85173120697
U2 - 10.1109/ICOCN59242.2023.10236341
DO - 10.1109/ICOCN59242.2023.10236341
M3 - 会议稿件
AN - SCOPUS:85173120697
T3 - 2023 21st International Conference on Optical Communications and Networks, ICOCN 2023
BT - 2023 21st International Conference on Optical Communications and Networks, ICOCN 2023
PB - Institute of Electrical and Electronics Engineers Inc.
T2 - 21st International Conference on Optical Communications and Networks, ICOCN 2023
Y2 - 31 July 2023 through 3 August 2023
ER -