Synchronized oscillation in micro-mechanically coupled oscillator system: Part III-Optimization of polymer-based structures applicable to gas molecule sensing

  • Xu Du
  • , Mengyuan Mao
  • , Dong F. Wang
  • , Zhiyu Zhang
  • , Xu Yang
  • , Xin Wang
  • , Xin Liu
  • , Tsuyoshi Ikehara
  • , Ryutaro Maeda

Research output: Chapter in Book/Report/Conference proceedingConference contributionpeer-review

2 Scopus citations

Abstract

An oscillation system, consisting of a U-shaped and a beam-shaped cantilevers coupled via synchronization was reported in DTIP 2012 which focused on the synchronized region. While the doubled frequency response by the super-harmonic oscillation was studied in DTIP 2013. In this work, the frequency enhancement is achieved by using coupled synchronized cantilever system which oscillates in the second eigenstate vibration mode and is expected to be applied to gas molecule sensing. Polymer-based systems consist of two cantilevers coupled with coupling overhangs are proposed. The synchronized oscillation is analytically observed for the first time in PMMA cantilevers by eliminating the torsion effect via putting up two symmetric side overhangs except the center one. Compared to a rectangular one, a T-shaped beam with larger adsorbing area is selected for further examination on the improvement of torsion effect on the above second mode by changing 2D sizes of two symmetric side overhangs. Sensitivities of three cantilever structures of rectangular beam, T-shaped beam and interdigital beam are compared by increasing the mass perturbation on the gas-sensitive layer to generate frequency shift. The easily manufacturable polymer-based oscillator system is applicable to disposable gas molecule sensing, as well as repeated use.

Original languageEnglish
Title of host publicationSymposium on Design, Test, Integration and Packaging of MEMS/MOEMS, DTIP 2016
EditorsYoshio Mita, Marta Rencz, Benoit Charlot, Peter Schneider, Niels Tas, Pascal Nouet, Francis Pressecq
PublisherInstitute of Electrical and Electronics Engineers Inc.
ISBN (Electronic)9781509014576
DOIs
StatePublished - 15 Jul 2016
Externally publishedYes
Event18th Symposium on Design, Test, Integration and Packaging of MEMS/MOEMS, DTIP 2016 - Budapest, Hungary
Duration: 30 May 20162 Jun 2016

Publication series

NameSymposium on Design, Test, Integration and Packaging of MEMS/MOEMS, DTIP 2016

Conference

Conference18th Symposium on Design, Test, Integration and Packaging of MEMS/MOEMS, DTIP 2016
Country/TerritoryHungary
CityBudapest
Period30/05/162/06/16

Keywords

  • Gas molecule sensing
  • Polymer-based structure
  • Sensitivity improvement
  • Structural optimization
  • Synchronized oscillation
  • Torsion effect

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