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Synchronized oscillation in micro mechanically coupled opposite C-shaped cantilever-based oscillator system

  • Ibaraki University
  • National Institute of Advanced Industrial Science and Technology

Research output: Chapter in Book/Report/Conference proceedingConference contributionpeer-review

10 Scopus citations

Abstract

A novel oscillation system, consisting of an opposite C-shaped cantilever and a beam-shaped cantilever, has been newly designed, preliminarily fabricated and characterized for synchronized oscillation-based ultimate sensing applications. Two geometrically different cantilevers, with resonant frequencies of 300.76 kHz (detecting) and 149.77 kHz (sensing), are coupled by two coupling overhangs as micromechanical elements. However, under synchronized oscillation, frequency response signal (182.85 kHz) was doubled (365.71 kHz) from low frequency cantilever (opposite C-shaped) to high frequency cantilever (beam-shaped). A flat interval with a frequency ratio of 2.00 corresponding to a stable synchronization region was further confirmed. This implies that it is possible to enlarge the frequency response signal from the low frequency cantilever to the high frequency cantilever based on this kind of super harmonic synchronization.

Original languageEnglish
Title of host publication2011 16th International Solid-State Sensors, Actuators and Microsystems Conference, TRANSDUCERS'11
Pages1492-1495
Number of pages4
DOIs
StatePublished - 2011
Externally publishedYes
Event2011 16th International Solid-State Sensors, Actuators and Microsystems Conference, TRANSDUCERS'11 - Beijing, China
Duration: 5 Jun 20119 Jun 2011

Publication series

Name2011 16th International Solid-State Sensors, Actuators and Microsystems Conference, TRANSDUCERS'11

Conference

Conference2011 16th International Solid-State Sensors, Actuators and Microsystems Conference, TRANSDUCERS'11
Country/TerritoryChina
CityBeijing
Period5/06/119/06/11

Keywords

  • Beam-shaped
  • Doubling frequency response
  • Frequency ratio
  • Opposite C-shaped
  • Synchronization

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