Surface dynamics transition during the growth of compositionally graded CrNx films

J. J. Yang; F. M. Miao; J. Tang; X. Y. Shu; F. Ma; K. W. Xu; Y. Y. Yang; J. L. Liao; N. Liu

doi:10.1063/1.4862650

Surface dynamics transition during the growth of compositionally graded CrN_x films

J. J. Yang
, F. M. Miao
, J. Tang
, X. Y. Shu
, F. Ma
, K. W. Xu
, Y. Y. Yang
, J. L. Liao
, N. Liu

School of Materials Science and Engineering

Sichuan University
Xi'an Jiaotong University

Research output: Contribution to journal › Article › peer-review

2 Scopus citations

Abstract

We report a direct experimental study on the surface dynamics of reactive-sputtered compositionally graded (CG) CrN_x films. Based on the dynamic scaling analysis, an intriguing transition of surface dynamics from Family-Vicsek scaling (I regime) to "oscillating" mode (II regime) and then to anomalous rapid-roughening scaling (III regime) is observed. This transition is closely related to the reactive sputtering process of CG nitride films. Especially, it is found that the oscillating behavior of surface dynamics in regime II originates from the alternate growth of crystalline and amorphous phases on the growing surface.

Original language	English
Article number	031602
Journal	Applied Physics Letters
Volume	104
Issue number	3
DOIs	https://doi.org/10.1063/1.4862650
State	Published - 20 Jan 2014

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title = "Surface dynamics transition during the growth of compositionally graded CrNx films",

abstract = "We report a direct experimental study on the surface dynamics of reactive-sputtered compositionally graded (CG) CrNx films. Based on the dynamic scaling analysis, an intriguing transition of surface dynamics from Family-Vicsek scaling (I regime) to {"}oscillating{"} mode (II regime) and then to anomalous rapid-roughening scaling (III regime) is observed. This transition is closely related to the reactive sputtering process of CG nitride films. Especially, it is found that the oscillating behavior of surface dynamics in regime II originates from the alternate growth of crystalline and amorphous phases on the growing surface.",

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T1 - Surface dynamics transition during the growth of compositionally graded CrNx films

AU - Yang, J. J.

AU - Miao, F. M.

AU - Tang, J.

AU - Shu, X. Y.

AU - Ma, F.

AU - Xu, K. W.

AU - Yang, Y. Y.

AU - Liao, J. L.

AU - Liu, N.

PY - 2014/1/20

Y1 - 2014/1/20

N2 - We report a direct experimental study on the surface dynamics of reactive-sputtered compositionally graded (CG) CrNx films. Based on the dynamic scaling analysis, an intriguing transition of surface dynamics from Family-Vicsek scaling (I regime) to "oscillating" mode (II regime) and then to anomalous rapid-roughening scaling (III regime) is observed. This transition is closely related to the reactive sputtering process of CG nitride films. Especially, it is found that the oscillating behavior of surface dynamics in regime II originates from the alternate growth of crystalline and amorphous phases on the growing surface.

AB - We report a direct experimental study on the surface dynamics of reactive-sputtered compositionally graded (CG) CrNx films. Based on the dynamic scaling analysis, an intriguing transition of surface dynamics from Family-Vicsek scaling (I regime) to "oscillating" mode (II regime) and then to anomalous rapid-roughening scaling (III regime) is observed. This transition is closely related to the reactive sputtering process of CG nitride films. Especially, it is found that the oscillating behavior of surface dynamics in regime II originates from the alternate growth of crystalline and amorphous phases on the growing surface.

UR - https://www.scopus.com/pages/publications/84893366717

U2 - 10.1063/1.4862650

DO - 10.1063/1.4862650

M3 - 文章

AN - SCOPUS:84893366717

SN - 0003-6951

VL - 104

JO - Applied Physics Letters

JF - Applied Physics Letters

IS - 3

M1 - 031602

ER -

Surface dynamics transition during the growth of compositionally graded CrN_x films

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