Surface-conduction electron emission from Nb-Si-N thin film

S. L. Xiong; Z. X. Song; S. L. Wu; L. G. Zhao; J. F. Wang; H. Y. Wu; C. L. Liu

Surface-conduction electron emission from Nb-Si-N thin film

S. L. Xiong
, Z. X. Song
, S. L. Wu
, L. G. Zhao
, J. F. Wang
, H. Y. Wu
, C. L. Liu

School of Materials Science and Engineering

Xi'an Jiaotong University

Research output: Contribution to conference › Paper › peer-review

3 Scopus citations

Abstract

We propose to sputter a new ternary material Nb-Si-N as the conductive film. With this ternary film composition, the film's sheet resistance can be adjusted easily to satisfy the requirement of the electro-forming process. The experiment results show that Nb-Si-N can be a kind of conductive film material for SCEs.

Original language	English
Pages	2005-2007
Number of pages	3
State	Published - 2009
Event	16th International Display Workshops, IDW '09 - Miyazaki, Japan Duration: 9 Dec 2009 → 11 Dec 2009

Conference

Conference	16th International Display Workshops, IDW '09
Country/Territory	Japan
City	Miyazaki
Period	9/12/09 → 11/12/09

Cite this

@conference{974796dc7cf14dec97ad8bbf3a5f18ef,

title = "Surface-conduction electron emission from Nb-Si-N thin film",

abstract = "We propose to sputter a new ternary material Nb-Si-N as the conductive film. With this ternary film composition, the film's sheet resistance can be adjusted easily to satisfy the requirement of the electro-forming process. The experiment results show that Nb-Si-N can be a kind of conductive film material for SCEs.",

author = "Xiong, \{S. L.\} and Song, \{Z. X.\} and Wu, \{S. L.\} and Zhao, \{L. G.\} and Wang, \{J. F.\} and Wu, \{H. Y.\} and Liu, \{C. L.\}",

year = "2009",

language = "英语",

pages = "2005--2007",

note = "16th International Display Workshops, IDW '09 ; Conference date: 09-12-2009 Through 11-12-2009",

}

TY - CONF

T1 - Surface-conduction electron emission from Nb-Si-N thin film

AU - Xiong, S. L.

AU - Song, Z. X.

AU - Wu, S. L.

AU - Zhao, L. G.

AU - Wang, J. F.

AU - Wu, H. Y.

AU - Liu, C. L.

PY - 2009

Y1 - 2009

N2 - We propose to sputter a new ternary material Nb-Si-N as the conductive film. With this ternary film composition, the film's sheet resistance can be adjusted easily to satisfy the requirement of the electro-forming process. The experiment results show that Nb-Si-N can be a kind of conductive film material for SCEs.

AB - We propose to sputter a new ternary material Nb-Si-N as the conductive film. With this ternary film composition, the film's sheet resistance can be adjusted easily to satisfy the requirement of the electro-forming process. The experiment results show that Nb-Si-N can be a kind of conductive film material for SCEs.

UR - https://www.scopus.com/pages/publications/77954157609

M3 - 论文

AN - SCOPUS:77954157609

SP - 2005

EP - 2007

T2 - 16th International Display Workshops, IDW '09

Y2 - 9 December 2009 through 11 December 2009

ER -

Surface-conduction electron emission from Nb-Si-N thin film

Abstract

Conference

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