Abstract
This work successfully enhanced the performance of diamond ultraviolet (UV) photodetectors (PDs) via reducing solubility of nitrogen to suppress the defects in diamond film by introducing tungsten during diamond growth. Photoluminescence spectra exhibited less defects in diamond film with tungsten introduction, whose better quality was verified by Raman spectra. PDs fabricated on this film indicated a great improvement of optical-electrical properties. Its sensitivity, responsivity under 225-nm UV radiation, and UV/visible rejection ratio were enhanced to 2, 937.5, and 4 times, respectively, compared with PD based on normal diamond.
| Original language | English |
|---|---|
| Pages (from-to) | 6228-6232 |
| Number of pages | 5 |
| Journal | IEEE Transactions on Electron Devices |
| Volume | 68 |
| Issue number | 12 |
| DOIs | |
| State | Published - 1 Dec 2021 |
Keywords
- Diamond
- homoepitaxy
- photodetector (PD)