Study on the description and input method of micro devices manufacturing feature's information

An information description and the corresponding input method, based on the feature of multi-layers solid and face's juncture, are proposed for the Si-basis fabrication. Micro device can be decomposed into respective layers, and every layer is described by their main feature and some additive features. A series of micro 3D and 2D manufacturing features related to mirco-fabrication process are built. A four levels model concerning the general, layer, feature and property is configured to indicate the device information. A formed device feature tree, which consists of all geometrical and technological information of the micro devices, provides the information foundation for the follow-up design and manufacture processes.