Study on micro-clamping mechanism in mems

Xiaonan Chen; Peilin Yang; Zhuangde Jiang; Xiaofen Liu

Study on micro-clamping mechanism in mems

Xiaonan Chen
, Peilin Yang
, Zhuangde Jiang
, Xiaofen Liu

School of Mechanical Engineering

Xi'an Jiaotong University

Research output: Chapter in Book/Report/Conference proceeding › Conference contribution › peer-review

Abstract

A micro-clamping mechanism is designed and analyzed in this paper. The material used to fabricate the micro-clamping mechanism is Qbe₂, and the piezoelectric ceramic is selected as the driving component that can be controlled easily. The micro-clamping mechanism has the open distance of 250 micrometers. Stability of the micro-clamping mechanism is studied to determine the thickness of the mechanism that is made of thin plate. Theoretical and experimental analyses are conduced to study the magnifying multiple of the mechanism. It is found that there exists certain difference between the theoretical and experimental results. The difference is then discussed and explained using elastic theory. Finally the characteristics of the micro-clamping mechanism are summarized and some conclusions are given.

Original language	English
Title of host publication	Proceedings of the International Conference on Mechanical Transmissions (ICMT 2001)
Editors	D. Qin, X. Chen, B. Chen, C. Liu, D. Qin, X. Chen, B. Chen, C. Lin
Pages	335-336
Number of pages	2
State	Published - 2001
Event	Proceedings of the International Conference on Mechanical Transmissions (ICMT 2001) - Chongqing, China Duration: 5 Apr 2001 → 9 Apr 2001

Publication series

Name	Proceedings of the International Conference on Mechanical Transmissions (ICMT 2001)

Conference

Conference	Proceedings of the International Conference on Mechanical Transmissions (ICMT 2001)
Country/Territory	China
City	Chongqing
Period	5/04/01 → 9/04/01

Keywords

Flexible hinge mechanism
Mems
Micro-clamping mechanism

Cite this

Chen, Xiaonan ; Yang, Peilin ; Jiang, Zhuangde et al. / Study on micro-clamping mechanism in mems. Proceedings of the International Conference on Mechanical Transmissions (ICMT 2001). editor / D. Qin ; X. Chen ; B. Chen ; C. Liu ; D. Qin ; X. Chen ; B. Chen ; C. Lin. 2001. pp. 335-336 (Proceedings of the International Conference on Mechanical Transmissions (ICMT 2001)).

@inproceedings{db1f0aed5789471d8c57b5fff9df25d5,

title = "Study on micro-clamping mechanism in mems",

abstract = "A micro-clamping mechanism is designed and analyzed in this paper. The material used to fabricate the micro-clamping mechanism is Qbe2, and the piezoelectric ceramic is selected as the driving component that can be controlled easily. The micro-clamping mechanism has the open distance of 250 micrometers. Stability of the micro-clamping mechanism is studied to determine the thickness of the mechanism that is made of thin plate. Theoretical and experimental analyses are conduced to study the magnifying multiple of the mechanism. It is found that there exists certain difference between the theoretical and experimental results. The difference is then discussed and explained using elastic theory. Finally the characteristics of the micro-clamping mechanism are summarized and some conclusions are given.",

keywords = "Flexible hinge mechanism, Mems, Micro-clamping mechanism",

author = "Xiaonan Chen and Peilin Yang and Zhuangde Jiang and Xiaofen Liu",

year = "2001",

language = "英语",

isbn = "7900066144",

series = "Proceedings of the International Conference on Mechanical Transmissions (ICMT 2001)",

pages = "335--336",

editor = "D. Qin and X. Chen and B. Chen and C. Liu and D. Qin and X. Chen and B. Chen and C. Lin",

booktitle = "Proceedings of the International Conference on Mechanical Transmissions (ICMT 2001)",

note = "Proceedings of the International Conference on Mechanical Transmissions (ICMT 2001) ; Conference date: 05-04-2001 Through 09-04-2001",

}

Chen, X, Yang, P, Jiang, Z & Liu, X 2001, Study on micro-clamping mechanism in mems. in D Qin, X Chen, B Chen, C Liu, D Qin, X Chen, B Chen & C Lin (eds), Proceedings of the International Conference on Mechanical Transmissions (ICMT 2001). Proceedings of the International Conference on Mechanical Transmissions (ICMT 2001), pp. 335-336, Proceedings of the International Conference on Mechanical Transmissions (ICMT 2001), Chongqing, China, 5/04/01.

Study on micro-clamping mechanism in mems. / Chen, Xiaonan; Yang, Peilin; Jiang, Zhuangde et al.
Proceedings of the International Conference on Mechanical Transmissions (ICMT 2001). ed. / D. Qin; X. Chen; B. Chen; C. Liu; D. Qin; X. Chen; B. Chen; C. Lin. 2001. p. 335-336 (Proceedings of the International Conference on Mechanical Transmissions (ICMT 2001)).

Research output: Chapter in Book/Report/Conference proceeding › Conference contribution › peer-review

TY - GEN

T1 - Study on micro-clamping mechanism in mems

AU - Chen, Xiaonan

AU - Yang, Peilin

AU - Jiang, Zhuangde

AU - Liu, Xiaofen

PY - 2001

Y1 - 2001

N2 - A micro-clamping mechanism is designed and analyzed in this paper. The material used to fabricate the micro-clamping mechanism is Qbe2, and the piezoelectric ceramic is selected as the driving component that can be controlled easily. The micro-clamping mechanism has the open distance of 250 micrometers. Stability of the micro-clamping mechanism is studied to determine the thickness of the mechanism that is made of thin plate. Theoretical and experimental analyses are conduced to study the magnifying multiple of the mechanism. It is found that there exists certain difference between the theoretical and experimental results. The difference is then discussed and explained using elastic theory. Finally the characteristics of the micro-clamping mechanism are summarized and some conclusions are given.

AB - A micro-clamping mechanism is designed and analyzed in this paper. The material used to fabricate the micro-clamping mechanism is Qbe2, and the piezoelectric ceramic is selected as the driving component that can be controlled easily. The micro-clamping mechanism has the open distance of 250 micrometers. Stability of the micro-clamping mechanism is studied to determine the thickness of the mechanism that is made of thin plate. Theoretical and experimental analyses are conduced to study the magnifying multiple of the mechanism. It is found that there exists certain difference between the theoretical and experimental results. The difference is then discussed and explained using elastic theory. Finally the characteristics of the micro-clamping mechanism are summarized and some conclusions are given.

KW - Flexible hinge mechanism

KW - Mems

KW - Micro-clamping mechanism

UR - https://www.scopus.com/pages/publications/0035785701

M3 - 会议稿件

AN - SCOPUS:0035785701

SN - 7900066144

T3 - Proceedings of the International Conference on Mechanical Transmissions (ICMT 2001)

SP - 335

EP - 336

BT - Proceedings of the International Conference on Mechanical Transmissions (ICMT 2001)

A2 - Qin, D.

A2 - Chen, X.

A2 - Chen, B.

A2 - Liu, C.

A2 - Qin, D.

A2 - Chen, X.

A2 - Chen, B.

A2 - Lin, C.

T2 - Proceedings of the International Conference on Mechanical Transmissions (ICMT 2001)

Y2 - 5 April 2001 through 9 April 2001

ER -

Study on micro-clamping mechanism in mems

Abstract

Publication series

Conference

Keywords

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