Abstract
The location of the zero optical path difference is one of the key factors in scanning white-light interferometry. The measuring principle of scanning white-light interferometry is introduced. Four different algorithms, which fixed the location of the zero optical path difference, are discussed respectively. Large number of simulation measurements on generated random surface is done, and available conclusions are got by comparing and experiment results are analyzed. The research is important to guide developing white-light interferometry.
| Original language | English |
|---|---|
| Pages (from-to) | 74-76+79 |
| Journal | Guangxue Jishu/Optical Technique |
| Volume | 34 |
| Issue number | SUPPL. |
| State | Published - Dec 2008 |
Keywords
- Digital simulation
- Profile measurement
- White-light interferometry
- Zero optical path difference