Study on key algorithm for scanning white-light interferometry

Research output: Chapter in Book/Report/Conference proceedingConference contributionpeer-review

13 Scopus citations

Abstract

Determining the location of the zero order fringes is one of the key aspects in scanning white-light interferometry. The measurement principle of the scanning white-light interferometry is introduced at first; then the location of the zero order fringes as calculated by four different algorithms; namely Weight-center, Phase-shift, Frequency Domain Analysis (FDA), and Coherent Correlation are compared. Finally, numerical simulations on random generated surfaces are done to reach conclusions by comparing and analyzing the results. The research is important in the understanding and development of white-light interferometry.

Original languageEnglish
Title of host publicationNinth International Symposium on Laser Metrology
DOIs
StatePublished - 2008
Event9th International Symposium on Laser Metrology - , Singapore
Duration: 30 Jun 20082 Jul 2008

Publication series

NameProceedings of SPIE - The International Society for Optical Engineering
Volume7155
ISSN (Print)0277-786X

Conference

Conference9th International Symposium on Laser Metrology
Country/TerritorySingapore
Period30/06/082/07/08

Keywords

  • Numerical simulation
  • Profile measurement
  • White-light interferometry
  • Zero order fringes

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