@inproceedings{7200d9529fbf43c88fcc97385e0179fd,
title = "Study on key algorithm for scanning white-light interferometry",
abstract = "Determining the location of the zero order fringes is one of the key aspects in scanning white-light interferometry. The measurement principle of the scanning white-light interferometry is introduced at first; then the location of the zero order fringes as calculated by four different algorithms; namely Weight-center, Phase-shift, Frequency Domain Analysis (FDA), and Coherent Correlation are compared. Finally, numerical simulations on random generated surfaces are done to reach conclusions by comparing and analyzing the results. The research is important in the understanding and development of white-light interferometry.",
keywords = "Numerical simulation, Profile measurement, White-light interferometry, Zero order fringes",
author = "Tian Ailing and Wang Chunhui and Jiang Zhuangde and Wang Hongjun and Liu Bingcai",
year = "2008",
doi = "10.1117/12.814597",
language = "英语",
isbn = "9780819473981",
series = "Proceedings of SPIE - The International Society for Optical Engineering",
booktitle = "Ninth International Symposium on Laser Metrology",
note = "9th International Symposium on Laser Metrology ; Conference date: 30-06-2008 Through 02-07-2008",
}