TY - JOUR
T1 - Study on film resistivity of Energy Conversion Components for MEMS Initiating Explosive Device
AU - Ren, Wei
AU - Zhang, Bin
AU - Zhao, Yulong
AU - Chu, Enyi
AU - Yin, Ming
AU - Li, Hui
AU - Wang, Kexuan
N1 - Publisher Copyright:
© Published under licence by IOP Publishing Ltd.
PY - 2018/3/29
Y1 - 2018/3/29
N2 - Resistivity of Plane-film Energy Conversion Components is a key parameter to influence its resistance and explosive performance, and also it has important relations with the preparation of thin film technology, scale, structure and etc. In order to improve the design of Energy Conversion Components for MEMS Initiating Explosive Device, and reduce the design deviation of Energy Conversion Components in microscale, guarantee the design resistance and ignition performance of MEMS Initiating Explosive Device, this paper theoretically analyzed the influence factors of film resistivity in microscale, through the preparation of Al film and Ni-Cr film at different thickness with micro/nano, then obtain the film resistivity parameter of the typical metal under different thickness, and reveals the effect rule of the scale to the resistivity in microscale, at the same time we obtain the corresponding inflection point data.
AB - Resistivity of Plane-film Energy Conversion Components is a key parameter to influence its resistance and explosive performance, and also it has important relations with the preparation of thin film technology, scale, structure and etc. In order to improve the design of Energy Conversion Components for MEMS Initiating Explosive Device, and reduce the design deviation of Energy Conversion Components in microscale, guarantee the design resistance and ignition performance of MEMS Initiating Explosive Device, this paper theoretically analyzed the influence factors of film resistivity in microscale, through the preparation of Al film and Ni-Cr film at different thickness with micro/nano, then obtain the film resistivity parameter of the typical metal under different thickness, and reveals the effect rule of the scale to the resistivity in microscale, at the same time we obtain the corresponding inflection point data.
KW - MEMS energy conversion component
KW - Scale effect
KW - resistivity
UR - https://www.scopus.com/pages/publications/85045661830
U2 - 10.1088/1742-6596/986/1/012004
DO - 10.1088/1742-6596/986/1/012004
M3 - 会议文章
AN - SCOPUS:85045661830
SN - 1742-6588
VL - 986
JO - Journal of Physics: Conference Series
JF - Journal of Physics: Conference Series
IS - 1
M1 - 012004
T2 - 19th Annual Conference and 8th International Conference of Chinese Society of Micro/Nano Technology, CSMNT 2017
Y2 - 26 October 2017 through 29 October 2017
ER -