Abstract
Analyzing the different microfabrication technology stages-Halbach magnet array and solenoid construction type, it is shown that their magnetic fields are more complex and difficult to be modeled and controlled. A novel microfabrication technology stage is developed and its magnetic flux density ripple has been analyzed. The quadratic programming is proposed to optimize the design, using the flux density ripple and driving force as the objects of optimization. The optimized results show that the flux density ripple is decreased by 30% and the force is increased by 10%. The simulation demonstrates the system has a broad frequency band 0~8 kHz.
| Original language | English |
|---|---|
| Pages (from-to) | 63-68+72 |
| Journal | Weixi Jiagong Jishu/Microfabrication Technology |
| Issue number | 2 |
| State | Published - Jun 2005 |
Keywords
- Halbach magnet array
- Magnetic flux density ripple
- Microfabrication technology stage