Study of crescent shaped alignment marks applicable to self-alignment of micro-parts with and without positive and negative poles

A "crescent-shaped" binding alignment mark, more applicable to the self-alignment than reported "teardrop/ elliptical hole" pattern, has been designed and comparatively studied with other possible alignment marks. In order to further apply this novel design to micro-parts with positive and negative poles on the binding sites, a modified "crescent-shaped" pattern with an insulated space area, defined as "crescent-shaped/ interval" for self-alignment of micro-parts with two poles has been therefore proposed and discussed. The fabrication process using micromachining has been studied and both the substrates and micro-parts with alignment marks have been fabricated for next selfalignment verification.