Structure and expected piezoelectric properties of sol-gel derived multilayer PZT films

K. Miyazawa; R. Maeda; K. Ito

doi:10.1016/s0167-2738(98)00023-x

Structure and expected piezoelectric properties of sol-gel derived multilayer PZT films

K. Miyazawa
, R. Maeda
, K. Ito

The University of Tokyo
National Institute of Advanced Industrial Science and Technology

Research output: Contribution to journal › Article › peer-review

8 Scopus citations

Abstract

Multilayer duplex PZT films consisting of alternating porous and dense layers have been formed by a sol-gel repeated coating method with a heating rate of 100°C min^-1. Structure and porosity of the films are examined by XRD, TEM and FT-IR. The porosity of the multilayer films fired at 600°C is increased by heat treatment at 750°C. The volume fraction of the pyrochlore phase decreases with increasing coating time. The relative dielectric constant of multilayer films with thickness 12 μm ranges from 1100 (10 000 Hz) to 1400 (100 Hz). The piezoelectric voltage coefficient g₃₃ of the multilayer films is calculated to be enhanced by the introduction of layers with a high porosity.

Original language	English
Pages (from-to)	85-90
Number of pages	6
Journal	Solid State Ionics
Volume	108
Issue number	1-4
DOIs	https://doi.org/10.1016/s0167-2738(98)00023-x
State	Published - 1 May 1998
Externally published	Yes

Keywords

Multilayer
PZT
Piezoelectricity
Porosity
Refractive index
Sol-gel
TEM

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10.1016/s0167-2738(98)00023-x

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title = "Structure and expected piezoelectric properties of sol-gel derived multilayer PZT films",

abstract = "Multilayer duplex PZT films consisting of alternating porous and dense layers have been formed by a sol-gel repeated coating method with a heating rate of 100°C min-1. Structure and porosity of the films are examined by XRD, TEM and FT-IR. The porosity of the multilayer films fired at 600°C is increased by heat treatment at 750°C. The volume fraction of the pyrochlore phase decreases with increasing coating time. The relative dielectric constant of multilayer films with thickness 12 μm ranges from 1100 (10 000 Hz) to 1400 (100 Hz). The piezoelectric voltage coefficient g33 of the multilayer films is calculated to be enhanced by the introduction of layers with a high porosity.",

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author = "K. Miyazawa and R. Maeda and K. Ito",

year = "1998",

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doi = "10.1016/s0167-2738(98)00023-x",

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T1 - Structure and expected piezoelectric properties of sol-gel derived multilayer PZT films

AU - Miyazawa, K.

AU - Maeda, R.

AU - Ito, K.

PY - 1998/5/1

Y1 - 1998/5/1

N2 - Multilayer duplex PZT films consisting of alternating porous and dense layers have been formed by a sol-gel repeated coating method with a heating rate of 100°C min-1. Structure and porosity of the films are examined by XRD, TEM and FT-IR. The porosity of the multilayer films fired at 600°C is increased by heat treatment at 750°C. The volume fraction of the pyrochlore phase decreases with increasing coating time. The relative dielectric constant of multilayer films with thickness 12 μm ranges from 1100 (10 000 Hz) to 1400 (100 Hz). The piezoelectric voltage coefficient g33 of the multilayer films is calculated to be enhanced by the introduction of layers with a high porosity.

AB - Multilayer duplex PZT films consisting of alternating porous and dense layers have been formed by a sol-gel repeated coating method with a heating rate of 100°C min-1. Structure and porosity of the films are examined by XRD, TEM and FT-IR. The porosity of the multilayer films fired at 600°C is increased by heat treatment at 750°C. The volume fraction of the pyrochlore phase decreases with increasing coating time. The relative dielectric constant of multilayer films with thickness 12 μm ranges from 1100 (10 000 Hz) to 1400 (100 Hz). The piezoelectric voltage coefficient g33 of the multilayer films is calculated to be enhanced by the introduction of layers with a high porosity.

KW - Multilayer

KW - PZT

KW - Piezoelectricity

KW - Porosity

KW - Refractive index

KW - Sol-gel

KW - TEM

UR - https://www.scopus.com/pages/publications/0032074932

U2 - 10.1016/s0167-2738(98)00023-x

DO - 10.1016/s0167-2738(98)00023-x

M3 - 文章

AN - SCOPUS:0032074932

SN - 0167-2738

VL - 108

SP - 85

EP - 90

JO - Solid State Ionics

JF - Solid State Ionics

IS - 1-4

ER -

Structure and expected piezoelectric properties of sol-gel derived multilayer PZT films

Abstract

Keywords

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