Structure and electrical properties of multilayer PZT films prepared by sol-gel processing

Kun'Ichi Miyazawa; Kunio Ito; Ryutaro Maeda

doi:10.1016/S0272-8842(99)00085-1

Structure and electrical properties of multilayer PZT films prepared by sol-gel processing

Kun'Ichi Miyazawa
, Kunio Ito
, Ryutaro Maeda

Research output: Contribution to journal › Article › peer-review

19 Scopus citations

Abstract

Multilayer PZT(Zr:Ti = 52:48) films were prepared by the repeated process of spin-coating and firing at 600 °C of a PZT sol with various heating rates between 20 and 200 °C min^-1. Their structural and dielectric properties were examined. The multilayer film prepared with the heating rate of 50 °C min^-1 shows the highest dielectric constant and a smooth surface with no surface cracks. High-resolution TEM (HRTEM) observations of an as-deposited PZT film indicate nucleation of perovskite and pyrochlore crystals in the amorphous matrix. The perovskite crystals are found to form through the initial construction of {110} planes.

Original language	English
Pages (from-to)	501-506
Number of pages	6
Journal	Ceramics International
Volume	26
Issue number	5
DOIs	https://doi.org/10.1016/S0272-8842(99)00085-1
State	Published - 16 Jun 2000
Externally published	Yes

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title = "Structure and electrical properties of multilayer PZT films prepared by sol-gel processing",

abstract = "Multilayer PZT(Zr:Ti = 52:48) films were prepared by the repeated process of spin-coating and firing at 600 °C of a PZT sol with various heating rates between 20 and 200 °C min-1. Their structural and dielectric properties were examined. The multilayer film prepared with the heating rate of 50 °C min-1 shows the highest dielectric constant and a smooth surface with no surface cracks. High-resolution TEM (HRTEM) observations of an as-deposited PZT film indicate nucleation of perovskite and pyrochlore crystals in the amorphous matrix. The perovskite crystals are found to form through the initial construction of \{110\} planes.",

author = "Kun'Ichi Miyazawa and Kunio Ito and Ryutaro Maeda",

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doi = "10.1016/S0272-8842(99)00085-1",

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T1 - Structure and electrical properties of multilayer PZT films prepared by sol-gel processing

AU - Miyazawa, Kun'Ichi

AU - Ito, Kunio

AU - Maeda, Ryutaro

PY - 2000/6/16

Y1 - 2000/6/16

N2 - Multilayer PZT(Zr:Ti = 52:48) films were prepared by the repeated process of spin-coating and firing at 600 °C of a PZT sol with various heating rates between 20 and 200 °C min-1. Their structural and dielectric properties were examined. The multilayer film prepared with the heating rate of 50 °C min-1 shows the highest dielectric constant and a smooth surface with no surface cracks. High-resolution TEM (HRTEM) observations of an as-deposited PZT film indicate nucleation of perovskite and pyrochlore crystals in the amorphous matrix. The perovskite crystals are found to form through the initial construction of {110} planes.

AB - Multilayer PZT(Zr:Ti = 52:48) films were prepared by the repeated process of spin-coating and firing at 600 °C of a PZT sol with various heating rates between 20 and 200 °C min-1. Their structural and dielectric properties were examined. The multilayer film prepared with the heating rate of 50 °C min-1 shows the highest dielectric constant and a smooth surface with no surface cracks. High-resolution TEM (HRTEM) observations of an as-deposited PZT film indicate nucleation of perovskite and pyrochlore crystals in the amorphous matrix. The perovskite crystals are found to form through the initial construction of {110} planes.

UR - https://www.scopus.com/pages/publications/0033704856

U2 - 10.1016/S0272-8842(99)00085-1

DO - 10.1016/S0272-8842(99)00085-1

M3 - 文章

AN - SCOPUS:0033704856

SN - 0272-8842

VL - 26

SP - 501

EP - 506

JO - Ceramics International

JF - Ceramics International

IS - 5

ER -

Structure and electrical properties of multilayer PZT films prepared by sol-gel processing

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