Structure analysis of nano-scale dual-step fabricated by Focused Ion Beam

Chen Ying Wang; Zhuang De Jiang; Shu Ming Yang; Wei Xuan Jing; Qi Jing Lin; Feng Han

doi:10.1109/NANO.2013.6720987

Structure analysis of nano-scale dual-step fabricated by Focused Ion Beam

Chen Ying Wang
, Zhuang De Jiang
, Shu Ming Yang
, Wei Xuan Jing
, Qi Jing Lin
, Feng Han

Xi'an Jiaotong University
Huazhong University of Science and Technology

Research output: Chapter in Book/Report/Conference proceeding › Conference contribution › peer-review

3 Scopus citations

Abstract

A nano-scale dual-step was made by Focused Ion Beam (FIB). The shape of the nano two-step was measured using Atom Force Microscope (AFM). The parameter values in different location of the nano dual-step are compared, including the height h, the base surface roughness R_abase, the first-step surface roughness R_astep1, the second-step surface roughness R _astep2 and the sidewall inclination θ1, θ2. It was shown that the control of z direction was difficulte when the size was ≤ 50 nm.

Original language	English
Title of host publication	2013 13th IEEE International Conference on Nanotechnology, IEEE-NANO 2013
Pages	829-832
Number of pages	4
DOIs	https://doi.org/10.1109/NANO.2013.6720987
State	Published - 2013
Event	2013 13th IEEE International Conference on Nanotechnology, IEEE-NANO 2013 - Beijing, China Duration: 5 Aug 2013 → 8 Aug 2013

Publication series

Name	Proceedings of the IEEE Conference on Nanotechnology
ISSN (Print)	1944-9399
ISSN (Electronic)	1944-9380

Conference

Conference	2013 13th IEEE International Conference on Nanotechnology, IEEE-NANO 2013
Country/Territory	China
City	Beijing
Period	5/08/13 → 8/08/13

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10.1109/NANO.2013.6720987

Cite this

@inproceedings{e110f98d39644d38a0868c0372bb56cf,

title = "Structure analysis of nano-scale dual-step fabricated by Focused Ion Beam",

abstract = "A nano-scale dual-step was made by Focused Ion Beam (FIB). The shape of the nano two-step was measured using Atom Force Microscope (AFM). The parameter values in different location of the nano dual-step are compared, including the height h, the base surface roughness Rabase, the first-step surface roughness Rastep1, the second-step surface roughness R astep2 and the sidewall inclination θ1, θ2. It was shown that the control of z direction was difficulte when the size was ≤ 50 nm.",

author = "Wang, \{Chen Ying\} and Jiang, \{Zhuang De\} and Yang, \{Shu Ming\} and Jing, \{Wei Xuan\} and Lin, \{Qi Jing\} and Feng Han",

year = "2013",

doi = "10.1109/NANO.2013.6720987",

language = "英语",

isbn = "9781479906758",

series = "Proceedings of the IEEE Conference on Nanotechnology",

pages = "829--832",

booktitle = "2013 13th IEEE International Conference on Nanotechnology, IEEE-NANO 2013",

note = "2013 13th IEEE International Conference on Nanotechnology, IEEE-NANO 2013 ; Conference date: 05-08-2013 Through 08-08-2013",

}

Wang, CY, Jiang, ZD , Yang, SM, Jing, WX, Lin, QJ & Han, F 2013, Structure analysis of nano-scale dual-step fabricated by Focused Ion Beam. in 2013 13th IEEE International Conference on Nanotechnology, IEEE-NANO 2013., 6720987, Proceedings of the IEEE Conference on Nanotechnology, pp. 829-832, 2013 13th IEEE International Conference on Nanotechnology, IEEE-NANO 2013, Beijing, China, 5/08/13. https://doi.org/10.1109/NANO.2013.6720987

Structure analysis of nano-scale dual-step fabricated by Focused Ion Beam. / Wang, Chen Ying; Jiang, Zhuang De ; Yang, Shu Ming et al.
2013 13th IEEE International Conference on Nanotechnology, IEEE-NANO 2013. 2013. p. 829-832 6720987 (Proceedings of the IEEE Conference on Nanotechnology).

Research output: Chapter in Book/Report/Conference proceeding › Conference contribution › peer-review

TY - GEN

T1 - Structure analysis of nano-scale dual-step fabricated by Focused Ion Beam

AU - Wang, Chen Ying

AU - Jiang, Zhuang De

AU - Yang, Shu Ming

AU - Jing, Wei Xuan

AU - Lin, Qi Jing

AU - Han, Feng

PY - 2013

Y1 - 2013

N2 - A nano-scale dual-step was made by Focused Ion Beam (FIB). The shape of the nano two-step was measured using Atom Force Microscope (AFM). The parameter values in different location of the nano dual-step are compared, including the height h, the base surface roughness Rabase, the first-step surface roughness Rastep1, the second-step surface roughness R astep2 and the sidewall inclination θ1, θ2. It was shown that the control of z direction was difficulte when the size was ≤ 50 nm.

AB - A nano-scale dual-step was made by Focused Ion Beam (FIB). The shape of the nano two-step was measured using Atom Force Microscope (AFM). The parameter values in different location of the nano dual-step are compared, including the height h, the base surface roughness Rabase, the first-step surface roughness Rastep1, the second-step surface roughness R astep2 and the sidewall inclination θ1, θ2. It was shown that the control of z direction was difficulte when the size was ≤ 50 nm.

UR - https://www.scopus.com/pages/publications/84894199061

U2 - 10.1109/NANO.2013.6720987

DO - 10.1109/NANO.2013.6720987

M3 - 会议稿件

AN - SCOPUS:84894199061

SN - 9781479906758

T3 - Proceedings of the IEEE Conference on Nanotechnology

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BT - 2013 13th IEEE International Conference on Nanotechnology, IEEE-NANO 2013

T2 - 2013 13th IEEE International Conference on Nanotechnology, IEEE-NANO 2013

Y2 - 5 August 2013 through 8 August 2013

ER -

Structure analysis of nano-scale dual-step fabricated by Focused Ion Beam

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