Structural observation of PZT system film in the use of pulsed-laser deposition method

This paper reports the structural observation of the lead zirconate titanate system formed in the pulsed laser deposition method. Scanning electron microscopy and X-ray diffraction was used for surface and the crystal structure observation. The target materials are prepared in the conventional solid state reaction method in oxide powder. Perovskite structure was formed on the magnesium oxide substrate. On the other hand, this is not the case on the silicon substrate, which has a pyrochiore or amorphous and relatively void structure. This shows that the film formation behavior depends on not only the formation condition, e.g. temperature, vacuum ratio etc., but also on the substrate material.