Structural formation of the lead zirconate titanate in use of pulsed-laser ablation deposition

M. Ichiki; L. Zhang; Z. Wang; Y. Morikawa; M. Tanaka; R. Maeda

doi:10.1117/12.432952

Structural formation of the lead zirconate titanate in use of pulsed-laser ablation deposition

M. Ichiki
, L. Zhang
, Z. Wang
, Y. Morikawa
, M. Tanaka
, R. Maeda

National Institute of Advanced Industrial Science and Technology

Research output: Contribution to journal › Conference article › peer-review

7 Scopus citations

Abstract

This paper reports the structural properties of lead zirconate titanate system formed in pulsed laser ablation deposition method. X-ray diffraction and scanning electron microscope was used for surface and the crystalline structure observation. The target material is prepared in conventional solid state reaction method using oxide powder. Formed lead zirconate titanate film has amorphous structure in as-deposited condition. Post-annealing treatment between 600°C and 900°C was carried out after deposition. Perovskite structure was formed on the Pt/Ti/SiO₂/Si substrate after annealing treatment in all cases. The formed film has flat surface and homogeneous structure observed by scanning electron microscope.

Original language	English
Pages (from-to)	387-394
Number of pages	8
Journal	Proceedings of SPIE - The International Society for Optical Engineering
Volume	4467
DOIs	https://doi.org/10.1117/12.432952
State	Published - 2001
Externally published	Yes
Event	Complex Mediums II: Beyond Linear Isotropic Dielectrics - San Diego, CA, United States Duration: 30 Jul 2001 → 1 Aug 2001

Keywords

Film formation
Heat treatment
Lead zirconate titanate
Micro electro-mechanical system
PLAD
PZT
Perovskite structure
Post annealing
Pulsed laser ablation deposition
X-ray diffraction

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10.1117/12.432952

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title = "Structural formation of the lead zirconate titanate in use of pulsed-laser ablation deposition",

abstract = "This paper reports the structural properties of lead zirconate titanate system formed in pulsed laser ablation deposition method. X-ray diffraction and scanning electron microscope was used for surface and the crystalline structure observation. The target material is prepared in conventional solid state reaction method using oxide powder. Formed lead zirconate titanate film has amorphous structure in as-deposited condition. Post-annealing treatment between 600°C and 900°C was carried out after deposition. Perovskite structure was formed on the Pt/Ti/SiO2/Si substrate after annealing treatment in all cases. The formed film has flat surface and homogeneous structure observed by scanning electron microscope.",

keywords = "Film formation, Heat treatment, Lead zirconate titanate, Micro electro-mechanical system, PLAD, PZT, Perovskite structure, Post annealing, Pulsed laser ablation deposition, X-ray diffraction",

author = "M. Ichiki and L. Zhang and Z. Wang and Y. Morikawa and M. Tanaka and R. Maeda",

year = "2001",

doi = "10.1117/12.432952",

language = "英语",

volume = "4467",

pages = "387--394",

journal = "Proceedings of SPIE - The International Society for Optical Engineering",

issn = "0277-786X",

publisher = "SPIE",

note = "Complex Mediums II: Beyond Linear Isotropic Dielectrics ; Conference date: 30-07-2001 Through 01-08-2001",

}

TY - JOUR

T1 - Structural formation of the lead zirconate titanate in use of pulsed-laser ablation deposition

AU - Ichiki, M.

AU - Zhang, L.

AU - Wang, Z.

AU - Morikawa, Y.

AU - Tanaka, M.

AU - Maeda, R.

PY - 2001

Y1 - 2001

N2 - This paper reports the structural properties of lead zirconate titanate system formed in pulsed laser ablation deposition method. X-ray diffraction and scanning electron microscope was used for surface and the crystalline structure observation. The target material is prepared in conventional solid state reaction method using oxide powder. Formed lead zirconate titanate film has amorphous structure in as-deposited condition. Post-annealing treatment between 600°C and 900°C was carried out after deposition. Perovskite structure was formed on the Pt/Ti/SiO2/Si substrate after annealing treatment in all cases. The formed film has flat surface and homogeneous structure observed by scanning electron microscope.

AB - This paper reports the structural properties of lead zirconate titanate system formed in pulsed laser ablation deposition method. X-ray diffraction and scanning electron microscope was used for surface and the crystalline structure observation. The target material is prepared in conventional solid state reaction method using oxide powder. Formed lead zirconate titanate film has amorphous structure in as-deposited condition. Post-annealing treatment between 600°C and 900°C was carried out after deposition. Perovskite structure was formed on the Pt/Ti/SiO2/Si substrate after annealing treatment in all cases. The formed film has flat surface and homogeneous structure observed by scanning electron microscope.

KW - Film formation

KW - Heat treatment

KW - Lead zirconate titanate

KW - Micro electro-mechanical system

KW - PLAD

KW - PZT

KW - Perovskite structure

KW - Post annealing

KW - Pulsed laser ablation deposition

KW - X-ray diffraction

UR - https://www.scopus.com/pages/publications/0034780288

U2 - 10.1117/12.432952

DO - 10.1117/12.432952

M3 - 会议文章

AN - SCOPUS:0034780288

SN - 0277-786X

VL - 4467

SP - 387

EP - 394

JO - Proceedings of SPIE - The International Society for Optical Engineering

JF - Proceedings of SPIE - The International Society for Optical Engineering

T2 - Complex Mediums II: Beyond Linear Isotropic Dielectrics

Y2 - 30 July 2001 through 1 August 2001

ER -

Structural formation of the lead zirconate titanate in use of pulsed-laser ablation deposition

Abstract

Keywords

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