Structural and morphologic evolution of Pt/Ba0.7Sr 0.3TiO3/Pt capacitors with annealing processes

Y. L. Qin; C. L. Jia; K. Urban; R. Liedtke; R. Waser

doi:10.1063/1.1469683

Structural and morphologic evolution of Pt/Ba_0.7Sr _0.3TiO₃/Pt capacitors with annealing processes

Y. L. Qin
, C. L. Jia
, K. Urban
, R. Liedtke
, R. Waser

Faculty of Electronic and Information Engineering

Research output: Contribution to journal › Article › peer-review

16 Scopus citations

Abstract

The microstructure and chemistry of the as-grown, the postannealed and the forming-gas-atmosphere-treated Pt/Ba_0.7Sr_0.3TiO ₃/Pt capacitors are studied by means of high-resolution transmission electron microscopy and energy-disperse x-ray spectroscopy. It is found that the annealed Ba_0.7Sr_0.3TiO₃ films have larger grain size and more smooth top film-electrode interfaces. High-resolution images reveal the presence of disordered or amorphous regions at the interfaces in the Ba_0.7Sr_0.3TiO₃ film heated in the forming-gas atmosphere. These regions show a higher Ti/(Ba+Sr) ratio than the grain matrix. The effects of these amorphous regions on the electrical properties of Ba _0.7Sr_0.3TiO₃ films are discussed.

Original language	English
Pages (from-to)	2728-2730
Number of pages	3
Journal	Applied Physics Letters
Volume	80
Issue number	15
DOIs	https://doi.org/10.1063/1.1469683
State	Published - 15 Apr 2002

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abstract = "The microstructure and chemistry of the as-grown, the postannealed and the forming-gas-atmosphere-treated Pt/Ba0.7Sr0.3TiO 3/Pt capacitors are studied by means of high-resolution transmission electron microscopy and energy-disperse x-ray spectroscopy. It is found that the annealed Ba0.7Sr0.3TiO3 films have larger grain size and more smooth top film-electrode interfaces. High-resolution images reveal the presence of disordered or amorphous regions at the interfaces in the Ba0.7Sr0.3TiO3 film heated in the forming-gas atmosphere. These regions show a higher Ti/(Ba+Sr) ratio than the grain matrix. The effects of these amorphous regions on the electrical properties of Ba 0.7Sr0.3TiO3 films are discussed.",

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T1 - Structural and morphologic evolution of Pt/Ba0.7Sr 0.3TiO3/Pt capacitors with annealing processes

AU - Qin, Y. L.

AU - Jia, C. L.

AU - Urban, K.

AU - Liedtke, R.

AU - Waser, R.

PY - 2002/4/15

Y1 - 2002/4/15

N2 - The microstructure and chemistry of the as-grown, the postannealed and the forming-gas-atmosphere-treated Pt/Ba0.7Sr0.3TiO 3/Pt capacitors are studied by means of high-resolution transmission electron microscopy and energy-disperse x-ray spectroscopy. It is found that the annealed Ba0.7Sr0.3TiO3 films have larger grain size and more smooth top film-electrode interfaces. High-resolution images reveal the presence of disordered or amorphous regions at the interfaces in the Ba0.7Sr0.3TiO3 film heated in the forming-gas atmosphere. These regions show a higher Ti/(Ba+Sr) ratio than the grain matrix. The effects of these amorphous regions on the electrical properties of Ba 0.7Sr0.3TiO3 films are discussed.

AB - The microstructure and chemistry of the as-grown, the postannealed and the forming-gas-atmosphere-treated Pt/Ba0.7Sr0.3TiO 3/Pt capacitors are studied by means of high-resolution transmission electron microscopy and energy-disperse x-ray spectroscopy. It is found that the annealed Ba0.7Sr0.3TiO3 films have larger grain size and more smooth top film-electrode interfaces. High-resolution images reveal the presence of disordered or amorphous regions at the interfaces in the Ba0.7Sr0.3TiO3 film heated in the forming-gas atmosphere. These regions show a higher Ti/(Ba+Sr) ratio than the grain matrix. The effects of these amorphous regions on the electrical properties of Ba 0.7Sr0.3TiO3 films are discussed.

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DO - 10.1063/1.1469683

M3 - 文章

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ER -

Structural and morphologic evolution of Pt/Ba_0.7Sr _0.3TiO₃/Pt capacitors with annealing processes

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