Abstract
Micro stereolithography and the fabrication process of a micro-actuator manufactured by using the micro-stereolithography are introduced. The static characteristics of the micro-actuator driven by electrostatic force is analyzed in detail. Stable balance condition of movable plate electrode and range of displacement in the condition are deduced. The relationship between deflection of the movable plate electrode and the electrostatic force is shown. The results deduced by using the micro-actuator is validated.
| Original language | English |
|---|---|
| Pages (from-to) | 47-50 |
| Number of pages | 4 |
| Journal | Hsi-An Chiao Tung Ta Hsueh/Journal of Xi'an Jiaotong University |
| Volume | 35 |
| Issue number | 1 |
| State | Published - Jan 2001 |
| Externally published | Yes |
Keywords
- Electrostatic force
- Micro-actuator
- Stable balance
- Stereolithography
Fingerprint
Dive into the research topics of 'Static characteristics analysis of micro-actuator based on micro-stereolithography'. Together they form a unique fingerprint.Cite this
- APA
- Author
- BIBTEX
- Harvard
- Standard
- RIS
- Vancouver