@inproceedings{de053040e7404fea868cee9f5dd43ded,
title = "Spray coating fabrication: Thin film formation on non-planar surface",
abstract = "This paper presents a three-dimensional microfabrication and integration technology for MEMS smart materials that utilizes a spray coating method. Spray coating is shown to be most effective for additional deposition on non-planar surfaces. PZT films were formed both on flat and uneven surfaces at a thickness of about 1μm. Perovskite structures were formed with suitable heat treatment and ferroelectric P-E hysteresis loop was also obtained. This paper is the first report from our group and other researchers on the deposition of smart materials for MEMS using a spray coating method. Spray coating has been proposed as an effective three-dimensional coating method which can be used to deposit piezoelectrics, pyroelectrics, magnetics, etc. for sensors and actuators. The hydrophilic and hydrophobic properties between the substrate surface and ejected liquid are most essential process factors in the spray coating method for improving the film growth conditions.",
keywords = "Coatings, Fabrication, Ferroelectric films, Ferroelectric materials, Heat treatment, Magnetic hysteresis, Micromechanical devices, Spraying, Surface treatment, Transistors",
author = "M. Ichiki and L. Zhang and Z. Yang and T. Ikehara and R. Maeda",
note = "Publisher Copyright: {\textcopyright} 2003 IEEE.; 12th International Conference on Solid-State Sensors, Actuators and Microsystems, TRANSDUCERS 2003 - Digest of Technical Papers ; Conference date: 08-06-2003 Through 12-06-2003",
year = "2003",
doi = "10.1109/SENSOR.2003.1215601",
language = "英语",
series = "TRANSDUCERS 2003 - 12th International Conference on Solid-State Sensors, Actuators and Microsystems, Digest of Technical Papers",
publisher = "Institute of Electrical and Electronics Engineers Inc.",
pages = "825--828",
booktitle = "TRANSDUCERS 2003 - 12th International Conference on Solid-State Sensors, Actuators and Microsystems, Digest of Technical Papers",
}