Smart piezoelectric PZT microcantilevers with inherent sensing and actuating abilities for AFM and LFM

C. Lee; T. Itoh; J. Chu; T. Ohashi; R. Maeda; A. Schroth; T. Suga

Smart piezoelectric PZT microcantilevers with inherent sensing and actuating abilities for AFM and LFM

C. Lee
, T. Itoh
, J. Chu
, T. Ohashi
, R. Maeda
, A. Schroth
, T. Suga

The University of Tokyo

Research output: Contribution to journal › Conference article › peer-review

3 Scopus citations

Abstract

Novel designs of the force sensing components for an atomic force microscope (AFM) and lateral force microscope (LFM) have been proposed in this study. By using PZT thin layers, a smart structure that can perform force sensing and feedback actuation at the same time is applied to the AFM. Clear images can be derived by an AFM equipped with this smart structure. A structure of two parallel PZT bars integrated on a SiO₂ free standing cantilever has shown potential for operation in an LFM, because a difference in the piezoelectric charge outputs from these two beams will be induced by frictional force when the cantilever end quasi-staticly contacts with the sample surface in dynamic scanning across the surface.

Original language	English
Pages (from-to)	35-40
Number of pages	6
Journal	Materials Research Society Symposium - Proceedings
Volume	459
State	Published - 1997
Externally published	Yes
Event	Proceedings of the 1996 MRS Fall Symposium - Boston, MA, USA Duration: 2 Dec 1996 → 5 Dec 1996

Cite this

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title = "Smart piezoelectric PZT microcantilevers with inherent sensing and actuating abilities for AFM and LFM",

abstract = "Novel designs of the force sensing components for an atomic force microscope (AFM) and lateral force microscope (LFM) have been proposed in this study. By using PZT thin layers, a smart structure that can perform force sensing and feedback actuation at the same time is applied to the AFM. Clear images can be derived by an AFM equipped with this smart structure. A structure of two parallel PZT bars integrated on a SiO2 free standing cantilever has shown potential for operation in an LFM, because a difference in the piezoelectric charge outputs from these two beams will be induced by frictional force when the cantilever end quasi-staticly contacts with the sample surface in dynamic scanning across the surface.",

author = "C. Lee and T. Itoh and J. Chu and T. Ohashi and R. Maeda and A. Schroth and T. Suga",

year = "1997",

language = "英语",

volume = "459",

pages = "35--40",

journal = "Materials Research Society Symposium - Proceedings",

issn = "0272-9172",

publisher = "Materials Research Society",

note = "Proceedings of the 1996 MRS Fall Symposium ; Conference date: 02-12-1996 Through 05-12-1996",

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T1 - Smart piezoelectric PZT microcantilevers with inherent sensing and actuating abilities for AFM and LFM

AU - Lee, C.

AU - Itoh, T.

AU - Chu, J.

AU - Ohashi, T.

AU - Maeda, R.

AU - Schroth, A.

AU - Suga, T.

PY - 1997

Y1 - 1997

N2 - Novel designs of the force sensing components for an atomic force microscope (AFM) and lateral force microscope (LFM) have been proposed in this study. By using PZT thin layers, a smart structure that can perform force sensing and feedback actuation at the same time is applied to the AFM. Clear images can be derived by an AFM equipped with this smart structure. A structure of two parallel PZT bars integrated on a SiO2 free standing cantilever has shown potential for operation in an LFM, because a difference in the piezoelectric charge outputs from these two beams will be induced by frictional force when the cantilever end quasi-staticly contacts with the sample surface in dynamic scanning across the surface.

AB - Novel designs of the force sensing components for an atomic force microscope (AFM) and lateral force microscope (LFM) have been proposed in this study. By using PZT thin layers, a smart structure that can perform force sensing and feedback actuation at the same time is applied to the AFM. Clear images can be derived by an AFM equipped with this smart structure. A structure of two parallel PZT bars integrated on a SiO2 free standing cantilever has shown potential for operation in an LFM, because a difference in the piezoelectric charge outputs from these two beams will be induced by frictional force when the cantilever end quasi-staticly contacts with the sample surface in dynamic scanning across the surface.

UR - https://www.scopus.com/pages/publications/0030643630

M3 - 会议文章

AN - SCOPUS:0030643630

SN - 0272-9172

VL - 459

SP - 35

EP - 40

JO - Materials Research Society Symposium - Proceedings

JF - Materials Research Society Symposium - Proceedings

T2 - Proceedings of the 1996 MRS Fall Symposium

Y2 - 2 December 1996 through 5 December 1996

ER -

Smart piezoelectric PZT microcantilevers with inherent sensing and actuating abilities for AFM and LFM

Abstract

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