Abstract
We report new high quality factor (Q) integrated GHz magnetic inductors based on solenoid structures with FeGaB/ {\rm Al}-{2}{\rm O}-{3} multilayer films, which show significantly enhanced inductance and quality factor at GHz frequencies over their air core counterparts. These inductors show an excellent high-frequency performance with a wide operation frequency range 0.5-2.5 GHz, in which the inductance is flat and the peak quality factor can reach {\sim}{\rm 20}. The inductance of the magnetic inductor shows {>}{100\%} enhancement compared with that of the same size air core inductor. These novel GHz inductors with high inductance and Q enhancement show great promise for applications in radio frequency integrated circuits.
| Original language | English |
|---|---|
| Article number | 6784044 |
| Pages (from-to) | 1470-1476 |
| Number of pages | 7 |
| Journal | IEEE Transactions on Electron Devices |
| Volume | 61 |
| Issue number | 5 |
| DOIs | |
| State | Published - May 2014 |
| Externally published | Yes |
Keywords
- FeGaB
- high Q
- integrated magnetic inductor
- multilayer film
- radio frequency (RF) application
- solenoid.
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