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Significantly enhanced inductance and quality factor of GHz integrated magnetic solenoid inductors with FeGaB/Al2O3 Multilayer Films

  • Yuan Gao
  • , Saba Zare Zardareh
  • , Xi Yang
  • , Tian Xiang Nan
  • , Zi Yao Zhou
  • , Marvin Onabajo
  • , Ming Liu
  • , Andrew Aronow
  • , Krishnamurthy Mahalingam
  • , Brandon M. Howe
  • , Gail J. Brown
  • , Nian X. Sun
  • Northeastern University
  • University of California at Los Angeles
  • Air Force Research Laboratory

Research output: Contribution to journalArticlepeer-review

58 Scopus citations

Abstract

We report new high quality factor (Q) integrated GHz magnetic inductors based on solenoid structures with FeGaB/ {\rm Al}-{2}{\rm O}-{3} multilayer films, which show significantly enhanced inductance and quality factor at GHz frequencies over their air core counterparts. These inductors show an excellent high-frequency performance with a wide operation frequency range 0.5-2.5 GHz, in which the inductance is flat and the peak quality factor can reach {\sim}{\rm 20}. The inductance of the magnetic inductor shows {>}{100\%} enhancement compared with that of the same size air core inductor. These novel GHz inductors with high inductance and Q enhancement show great promise for applications in radio frequency integrated circuits.

Original languageEnglish
Article number6784044
Pages (from-to)1470-1476
Number of pages7
JournalIEEE Transactions on Electron Devices
Volume61
Issue number5
DOIs
StatePublished - May 2014
Externally publishedYes

Keywords

  • FeGaB
  • high Q
  • integrated magnetic inductor
  • multilayer film
  • radio frequency (RF) application
  • solenoid.

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