Abstract
This study introduces a photoacoustic spectroscopy (PAS) gas sensor based on an all-in-one nonresonant photoacoustic cell. A finite element model (FEM) of the sensor taking into account both photoacoustic and thermoacoustic signal is constructed. The key structural parameters of the all-in-one photoacoustic cell are carefully optimized and determined through simulation and then validated in experiments. The calibration results of the sensor demonstrate a maximum sensitivity of 0.207 mV per μ L/L in a measurement range of 0-5000μ L/L. Moreover, the proposed sensor is capable of achieving a fast response of 13 s, a detection limit of 1.14μ L/L, a measurement repeatability of 0.34%, and a high resistance to interference from humidity. The compact footprint and optimal performance of the proposed photoacoustic gas sensor make it a suitable to a broad spectrum of applications.
| Original language | English |
|---|---|
| Article number | 7500509 |
| Journal | IEEE Transactions on Instrumentation and Measurement |
| Volume | 74 |
| DOIs | |
| State | Published - 2025 |
Keywords
- Gas sensor
- micro-electromechanical systems (MEMS)
- photoacoustic CO2 detection
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