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Sensitivity Enhancement of a Miniaturized Nonresonant Photoacoustic Spectroscopy CO2 Sensor

  • Shudong Wang
  • , Boyang Wang
  • , Menghan Hua
  • , Yuchen He
  • , Pengxu Zhu
  • , Haojian Lu
  • , Yunjia Li
  • Xi'an Jiaotong University
  • Zhejiang University

Research output: Contribution to journalArticlepeer-review

5 Scopus citations

Abstract

This study introduces a photoacoustic spectroscopy (PAS) gas sensor based on an all-in-one nonresonant photoacoustic cell. A finite element model (FEM) of the sensor taking into account both photoacoustic and thermoacoustic signal is constructed. The key structural parameters of the all-in-one photoacoustic cell are carefully optimized and determined through simulation and then validated in experiments. The calibration results of the sensor demonstrate a maximum sensitivity of 0.207 mV per μ L/L in a measurement range of 0-5000μ L/L. Moreover, the proposed sensor is capable of achieving a fast response of 13 s, a detection limit of 1.14μ L/L, a measurement repeatability of 0.34%, and a high resistance to interference from humidity. The compact footprint and optimal performance of the proposed photoacoustic gas sensor make it a suitable to a broad spectrum of applications.

Original languageEnglish
Article number7500509
JournalIEEE Transactions on Instrumentation and Measurement
Volume74
DOIs
StatePublished - 2025

Keywords

  • Gas sensor
  • micro-electromechanical systems (MEMS)
  • photoacoustic CO2 detection

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